Hot-carrier induced degradation of polysilicon and tungsten polycide gate MOSFETs under maximum substrate and gate current stresses

10.1088/0268-1242/11/10/005

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Main Authors:	Lou, C.L., Chim, W.K., Chan, D.S.H., Pan, Y.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/80545
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-805452023-10-29T22:33:41Z Hot-carrier induced degradation of polysilicon and tungsten polycide gate MOSFETs under maximum substrate and gate current stresses Lou, C.L. Chim, W.K. Chan, D.S.H. Pan, Y. ELECTRICAL ENGINEERING 10.1088/0268-1242/11/10/005 Semiconductor Science and Technology 11 10 1381-1387 SSTEE 2014-10-07T02:58:42Z 2014-10-07T02:58:42Z 1996-10 Article Lou, C.L., Chim, W.K., Chan, D.S.H., Pan, Y. (1996-10). Hot-carrier induced degradation of polysilicon and tungsten polycide gate MOSFETs under maximum substrate and gate current stresses. Semiconductor Science and Technology 11 (10) : 1381-1387. ScholarBank@NUS Repository. https://doi.org/10.1088/0268-1242/11/10/005 02681242 http://scholarbank.nus.edu.sg/handle/10635/80545 A1996VU74700002 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1088/0268-1242/11/10/005
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Lou, C.L. Chim, W.K. Chan, D.S.H. Pan, Y.
format	Article
author	Lou, C.L. Chim, W.K. Chan, D.S.H. Pan, Y.
spellingShingle	Lou, C.L. Chim, W.K. Chan, D.S.H. Pan, Y. Hot-carrier induced degradation of polysilicon and tungsten polycide gate MOSFETs under maximum substrate and gate current stresses
author_sort	Lou, C.L.
title	Hot-carrier induced degradation of polysilicon and tungsten polycide gate MOSFETs under maximum substrate and gate current stresses
title_short	Hot-carrier induced degradation of polysilicon and tungsten polycide gate MOSFETs under maximum substrate and gate current stresses
title_full	Hot-carrier induced degradation of polysilicon and tungsten polycide gate MOSFETs under maximum substrate and gate current stresses
title_fullStr	Hot-carrier induced degradation of polysilicon and tungsten polycide gate MOSFETs under maximum substrate and gate current stresses
title_full_unstemmed	Hot-carrier induced degradation of polysilicon and tungsten polycide gate MOSFETs under maximum substrate and gate current stresses
title_sort	hot-carrier induced degradation of polysilicon and tungsten polycide gate mosfets under maximum substrate and gate current stresses
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/80545
_version_	1781783918704328704

Hot-carrier induced degradation of polysilicon and tungsten polycide gate MOSFETs under maximum substrate and gate current stresses

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