Influence of ion-beam energy and substrate temperature on the synthesis of carbon nitride thin films by nitrogen-ion-assisted pulsed laser deposition

Influence of ion-beam energy and substrate temperature on the synthesis of carbon nitride thin films by nitrogen-ion-assisted pulsed laser deposition

Journal of Applied Physics

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Bibliographic Details
Main Authors: Lu, Y.F., Ren, Z.M., Chong, T.C., Cheong, B.A., Pang, S.I., Wang, J.P., Li, K.
Other Authors: ELECTRICAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/80596
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-805962015-01-11T20:20:00Z Influence of ion-beam energy and substrate temperature on the synthesis of carbon nitride thin films by nitrogen-ion-assisted pulsed laser deposition Lu, Y.F. Ren, Z.M. Chong, T.C. Cheong, B.A. Pang, S.I. Wang, J.P. Li, K. ELECTRICAL ENGINEERING Journal of Applied Physics 86 9 4954-4958 JAPIA 2014-10-07T02:59:15Z 2014-10-07T02:59:15Z 1999-11-01 Article Lu, Y.F.,Ren, Z.M.,Chong, T.C.,Cheong, B.A.,Pang, S.I.,Wang, J.P.,Li, K. (1999-11-01). Influence of ion-beam energy and substrate temperature on the synthesis of carbon nitride thin films by nitrogen-ion-assisted pulsed laser deposition. Journal of Applied Physics 86 (9) : 4954-4958. ScholarBank@NUS Repository. 00218979 http://scholarbank.nus.edu.sg/handle/10635/80596 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description Journal of Applied Physics
author2 ELECTRICAL ENGINEERING
author_facet ELECTRICAL ENGINEERING
Lu, Y.F.
Ren, Z.M.
Chong, T.C.
Cheong, B.A.
Pang, S.I.
Wang, J.P.
Li, K.
format Article
author Lu, Y.F.
Ren, Z.M.
Chong, T.C.
Cheong, B.A.
Pang, S.I.
Wang, J.P.
Li, K.
spellingShingle Lu, Y.F.
Ren, Z.M.
Chong, T.C.
Cheong, B.A.
Pang, S.I.
Wang, J.P.
Li, K.
Influence of ion-beam energy and substrate temperature on the synthesis of carbon nitride thin films by nitrogen-ion-assisted pulsed laser deposition
author_sort Lu, Y.F.
title Influence of ion-beam energy and substrate temperature on the synthesis of carbon nitride thin films by nitrogen-ion-assisted pulsed laser deposition
title_short Influence of ion-beam energy and substrate temperature on the synthesis of carbon nitride thin films by nitrogen-ion-assisted pulsed laser deposition
title_full Influence of ion-beam energy and substrate temperature on the synthesis of carbon nitride thin films by nitrogen-ion-assisted pulsed laser deposition
title_fullStr Influence of ion-beam energy and substrate temperature on the synthesis of carbon nitride thin films by nitrogen-ion-assisted pulsed laser deposition
title_full_unstemmed Influence of ion-beam energy and substrate temperature on the synthesis of carbon nitride thin films by nitrogen-ion-assisted pulsed laser deposition
title_sort influence of ion-beam energy and substrate temperature on the synthesis of carbon nitride thin films by nitrogen-ion-assisted pulsed laser deposition
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/80596
_version_ 1681088917018771456

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