Influence of ion-beam energy and substrate temperature on the synthesis of carbon nitride thin films by nitrogen-ion-assisted pulsed laser deposition
Journal of Applied Physics
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Main Authors: | Lu, Y.F., Ren, Z.M., Chong, T.C., Cheong, B.A., Pang, S.I., Wang, J.P., Li, K. |
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Other Authors: | ELECTRICAL ENGINEERING |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/80596 |
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Institution: | National University of Singapore |
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