Investigation of dislocations in GaAs using cathodoluminescence in the scanning electron microscope

Scanning Microscopy

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Main Authors: Pey, K.L., Phang, J.C.H., Chan, D.S.H., Balk, L.J., Jakubowicz, A., Bresse, J.F., Myhajlenko, S.
Other Authors: INSTITUTE OF MICROELECTRONICS
Format: Article
Published: 2014
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Online Access:http://scholarbank.nus.edu.sg/handle/10635/80632
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-806322015-01-17T16:40:23Z Investigation of dislocations in GaAs using cathodoluminescence in the scanning electron microscope Pey, K.L. Phang, J.C.H. Chan, D.S.H. Balk, L.J. Jakubowicz, A. Bresse, J.F. Myhajlenko, S. INSTITUTE OF MICROELECTRONICS ELECTRICAL ENGINEERING Cathodoluminescence cathodoluminescence contrast dislocation GaAs preferential etching scanning electron microscope Scanning Microscopy 7 4 1195-1206 SCMIE 2014-10-07T02:59:38Z 2014-10-07T02:59:38Z 1993-12 Article Pey, K.L.,Phang, J.C.H.,Chan, D.S.H.,Balk, L.J.,Jakubowicz, A.,Bresse, J.F.,Myhajlenko, S. (1993-12). Investigation of dislocations in GaAs using cathodoluminescence in the scanning electron microscope. Scanning Microscopy 7 (4) : 1195-1206. ScholarBank@NUS Repository. 08917035 http://scholarbank.nus.edu.sg/handle/10635/80632 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
topic Cathodoluminescence
cathodoluminescence contrast
dislocation
GaAs
preferential etching
scanning electron microscope
spellingShingle Cathodoluminescence
cathodoluminescence contrast
dislocation
GaAs
preferential etching
scanning electron microscope
Pey, K.L.
Phang, J.C.H.
Chan, D.S.H.
Balk, L.J.
Jakubowicz, A.
Bresse, J.F.
Myhajlenko, S.
Investigation of dislocations in GaAs using cathodoluminescence in the scanning electron microscope
description Scanning Microscopy
author2 INSTITUTE OF MICROELECTRONICS
author_facet INSTITUTE OF MICROELECTRONICS
Pey, K.L.
Phang, J.C.H.
Chan, D.S.H.
Balk, L.J.
Jakubowicz, A.
Bresse, J.F.
Myhajlenko, S.
format Article
author Pey, K.L.
Phang, J.C.H.
Chan, D.S.H.
Balk, L.J.
Jakubowicz, A.
Bresse, J.F.
Myhajlenko, S.
author_sort Pey, K.L.
title Investigation of dislocations in GaAs using cathodoluminescence in the scanning electron microscope
title_short Investigation of dislocations in GaAs using cathodoluminescence in the scanning electron microscope
title_full Investigation of dislocations in GaAs using cathodoluminescence in the scanning electron microscope
title_fullStr Investigation of dislocations in GaAs using cathodoluminescence in the scanning electron microscope
title_full_unstemmed Investigation of dislocations in GaAs using cathodoluminescence in the scanning electron microscope
title_sort investigation of dislocations in gaas using cathodoluminescence in the scanning electron microscope
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/80632
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