Liquid-phase epitaxial growth of amorphous silicon during laser annealing of ultrashallow p+/n junctions
Applied Physics Letters
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sg-nus-scholar.10635-806812024-11-12T21:15:46Z Liquid-phase epitaxial growth of amorphous silicon during laser annealing of ultrashallow p+/n junctions Chong, Y.F. Pey, K.L. Lu, Y.F. Wee, A.T.S. Osipowicz, T. Seng, H.L. See, A. Dai, J.-Y. ELECTRICAL ENGINEERING PHYSICS Applied Physics Letters 77 19 2994-2996 APPLA 2014-10-07T03:00:09Z 2014-10-07T03:00:09Z 2000-11-06 Article Chong, Y.F.,Pey, K.L.,Lu, Y.F.,Wee, A.T.S.,Osipowicz, T.,Seng, H.L.,See, A.,Dai, J.-Y. (2000-11-06). Liquid-phase epitaxial growth of amorphous silicon during laser annealing of ultrashallow p+/n junctions. Applied Physics Letters 77 (19) : 2994-2996. ScholarBank@NUS Repository. 00036951 http://scholarbank.nus.edu.sg/handle/10635/80681 NOT_IN_WOS Scopus |
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National University of Singapore |
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Asia |
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Singapore Singapore |
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| description |
Applied Physics Letters |
| author2 |
ELECTRICAL ENGINEERING |
| author_facet |
ELECTRICAL ENGINEERING Chong, Y.F. Pey, K.L. Lu, Y.F. Wee, A.T.S. Osipowicz, T. Seng, H.L. See, A. Dai, J.-Y. |
| format |
Article |
| author |
Chong, Y.F. Pey, K.L. Lu, Y.F. Wee, A.T.S. Osipowicz, T. Seng, H.L. See, A. Dai, J.-Y. |
| spellingShingle |
Chong, Y.F. Pey, K.L. Lu, Y.F. Wee, A.T.S. Osipowicz, T. Seng, H.L. See, A. Dai, J.-Y. Liquid-phase epitaxial growth of amorphous silicon during laser annealing of ultrashallow p+/n junctions |
| author_sort |
Chong, Y.F. |
| title |
Liquid-phase epitaxial growth of amorphous silicon during laser annealing of ultrashallow p+/n junctions |
| title_short |
Liquid-phase epitaxial growth of amorphous silicon during laser annealing of ultrashallow p+/n junctions |
| title_full |
Liquid-phase epitaxial growth of amorphous silicon during laser annealing of ultrashallow p+/n junctions |
| title_fullStr |
Liquid-phase epitaxial growth of amorphous silicon during laser annealing of ultrashallow p+/n junctions |
| title_full_unstemmed |
Liquid-phase epitaxial growth of amorphous silicon during laser annealing of ultrashallow p+/n junctions |
| title_sort |
liquid-phase epitaxial growth of amorphous silicon during laser annealing of ultrashallow p+/n junctions |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/80681 |
| _version_ |
1821196562455330816 |