Liquid-phase epitaxial growth of amorphous silicon during laser annealing of ultrashallow p+/n junctions

Liquid-phase epitaxial growth of amorphous silicon during laser annealing of ultrashallow p+/n junctions

Applied Physics Letters

Saved in:
Bibliographic Details
Main Authors: Chong, Y.F., Pey, K.L., Lu, Y.F., Wee, A.T.S., Osipowicz, T., Seng, H.L., See, A., Dai, J.-Y.
Other Authors: ELECTRICAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/80681
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/80681

Similar Items