Structural characterization of rapid thermally oxidized silicon-germanium-carbon alloy films

Structural characterization of rapid thermally oxidized silicon-germanium-carbon alloy films

Materials Science and Engineering B: Solid-State Materials for Advanced Technology

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Bibliographic Details
Main Authors: Choi, W.K., Bera, L.K., Chen, J.H., Feng, W., Pey, K.L., Yoong, H., Mi, J., Zhang, F., Yang, C.Y.
Other Authors: ELECTRICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Raman spectroscopy
Rapid thermally oxidized film
Silicon-germanium-carbon alloy films
X-ray diffraction spectroscopy
Online Access:http://scholarbank.nus.edu.sg/handle/10635/81225
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Institution: National University of Singapore
Description
Summary:Materials Science and Engineering B: Solid-State Materials for Advanced Technology

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