Structural characterization of rapid thermally oxidized silicon-germanium-carbon alloy films

• Main Authors: Choi, W.K., Bera, L.K., Chen, J.H., Feng, W., Pey, K.L., Yoong, H., Mi, J., Zhang, F., Yang, C.Y.
• Other Authors: ELECTRICAL ENGINEERING
• Format: Article
• Published: 2014
• Subjects: Raman spectroscopy; Rapid thermally oxidized film; Silicon-germanium-carbon alloy films; X-ray diffraction spectroscopy
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/81225
• Institution: National University of Singapore

Materials Science and Engineering B: Solid-State Materials for Advanced Technology