Structural characterization of rapid thermally oxidized silicon-germanium-carbon alloy films

Materials Science and Engineering B: Solid-State Materials for Advanced Technology

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Bibliographic Details
Main Authors:	Choi, W.K., Bera, L.K., Chen, J.H., Feng, W., Pey, K.L., Yoong, H., Mi, J., Zhang, F., Yang, C.Y.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	Raman spectroscopy Rapid thermally oxidized film Silicon-germanium-carbon alloy films X-ray diffraction spectroscopy
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/81225
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-81225
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spelling	sg-nus-scholar.10635-812252015-01-13T23:26:38Z Structural characterization of rapid thermally oxidized silicon-germanium-carbon alloy films Choi, W.K. Bera, L.K. Chen, J.H. Feng, W. Pey, K.L. Yoong, H. Mi, J. Zhang, F. Yang, C.Y. ELECTRICAL ENGINEERING Raman spectroscopy Rapid thermally oxidized film Silicon-germanium-carbon alloy films X-ray diffraction spectroscopy Materials Science and Engineering B: Solid-State Materials for Advanced Technology 75 2-3 184-186 2014-10-07T03:05:59Z 2014-10-07T03:05:59Z 2000-06-01 Article Choi, W.K.,Bera, L.K.,Chen, J.H.,Feng, W.,Pey, K.L.,Yoong, H.,Mi, J.,Zhang, F.,Yang, C.Y. (2000-06-01). Structural characterization of rapid thermally oxidized silicon-germanium-carbon alloy films. Materials Science and Engineering B: Solid-State Materials for Advanced Technology 75 (2-3) : 184-186. ScholarBank@NUS Repository. 09215107 http://scholarbank.nus.edu.sg/handle/10635/81225 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Raman spectroscopy Rapid thermally oxidized film Silicon-germanium-carbon alloy films X-ray diffraction spectroscopy
spellingShingle	Raman spectroscopy Rapid thermally oxidized film Silicon-germanium-carbon alloy films X-ray diffraction spectroscopy Choi, W.K. Bera, L.K. Chen, J.H. Feng, W. Pey, K.L. Yoong, H. Mi, J. Zhang, F. Yang, C.Y. Structural characterization of rapid thermally oxidized silicon-germanium-carbon alloy films
description	Materials Science and Engineering B: Solid-State Materials for Advanced Technology
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Choi, W.K. Bera, L.K. Chen, J.H. Feng, W. Pey, K.L. Yoong, H. Mi, J. Zhang, F. Yang, C.Y.
format	Article
author	Choi, W.K. Bera, L.K. Chen, J.H. Feng, W. Pey, K.L. Yoong, H. Mi, J. Zhang, F. Yang, C.Y.
author_sort	Choi, W.K.
title	Structural characterization of rapid thermally oxidized silicon-germanium-carbon alloy films
title_short	Structural characterization of rapid thermally oxidized silicon-germanium-carbon alloy films
title_full	Structural characterization of rapid thermally oxidized silicon-germanium-carbon alloy films
title_fullStr	Structural characterization of rapid thermally oxidized silicon-germanium-carbon alloy films
title_full_unstemmed	Structural characterization of rapid thermally oxidized silicon-germanium-carbon alloy films
title_sort	structural characterization of rapid thermally oxidized silicon-germanium-carbon alloy films
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/81225
_version_	1681089032554020864

Structural characterization of rapid thermally oxidized silicon-germanium-carbon alloy films

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