Characterization of the plasma-induced effective mobility degradation of LATID NMOSFETs
International Symposium on Plasma Process-Induced Damage, P2ID, Proceedings
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2014
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sg-nus-scholar.10635-813882015-02-09T01:03:32Z Characterization of the plasma-induced effective mobility degradation of LATID NMOSFETs Lou, C.L. Song, J. Tan, C.B. Chim, W.K. Chan, D.S.H. Pan, Y. ELECTRICAL ENGINEERING International Symposium on Plasma Process-Induced Damage, P2ID, Proceedings 102-104 243 2014-10-07T03:07:47Z 2014-10-07T03:07:47Z 1997 Conference Paper Lou, C.L.,Song, J.,Tan, C.B.,Chim, W.K.,Chan, D.S.H.,Pan, Y. (1997). Characterization of the plasma-induced effective mobility degradation of LATID NMOSFETs. International Symposium on Plasma Process-Induced Damage, P2ID, Proceedings : 102-104. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/81388 NOT_IN_WOS Scopus |
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National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| description |
International Symposium on Plasma Process-Induced Damage, P2ID, Proceedings |
| author2 |
ELECTRICAL ENGINEERING |
| author_facet |
ELECTRICAL ENGINEERING Lou, C.L. Song, J. Tan, C.B. Chim, W.K. Chan, D.S.H. Pan, Y. |
| format |
Conference or Workshop Item |
| author |
Lou, C.L. Song, J. Tan, C.B. Chim, W.K. Chan, D.S.H. Pan, Y. |
| spellingShingle |
Lou, C.L. Song, J. Tan, C.B. Chim, W.K. Chan, D.S.H. Pan, Y. Characterization of the plasma-induced effective mobility degradation of LATID NMOSFETs |
| author_sort |
Lou, C.L. |
| title |
Characterization of the plasma-induced effective mobility degradation of LATID NMOSFETs |
| title_short |
Characterization of the plasma-induced effective mobility degradation of LATID NMOSFETs |
| title_full |
Characterization of the plasma-induced effective mobility degradation of LATID NMOSFETs |
| title_fullStr |
Characterization of the plasma-induced effective mobility degradation of LATID NMOSFETs |
| title_full_unstemmed |
Characterization of the plasma-induced effective mobility degradation of LATID NMOSFETs |
| title_sort |
characterization of the plasma-induced effective mobility degradation of latid nmosfets |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/81388 |
| _version_ |
1681089062152175616 |