New type of local defects in very thin silicon dioxide films on arsenic-implanted p-type silicon

Proceedings of the International Symposium on the Physical 7 Failure Analysis of Integrated Circuits, IPFA

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Bibliographic Details
Main Authors:	Lau, W.S., Pey, K.S., Ng, W.T., Sane, V., Heng, J.M.C., Phang, J.C.H., Chan, D.S.H., Chua, C.M., Cronquist, B., Lee, Bob
Other Authors:	ELECTRICAL ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/81602
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-816022015-01-08T00:40:22Z New type of local defects in very thin silicon dioxide films on arsenic-implanted p-type silicon Lau, W.S. Pey, K.S. Ng, W.T. Sane, V. Heng, J.M.C. Phang, J.C.H. Chan, D.S.H. Chua, C.M. Cronquist, B. Lee, Bob ELECTRICAL ENGINEERING Proceedings of the International Symposium on the Physical 7 Failure Analysis of Integrated Circuits, IPFA 135-139 234 2014-10-07T03:10:04Z 2014-10-07T03:10:04Z 1995 Conference Paper Lau, W.S.,Pey, K.S.,Ng, W.T.,Sane, V.,Heng, J.M.C.,Phang, J.C.H.,Chan, D.S.H.,Chua, C.M.,Cronquist, B.,Lee, Bob (1995). New type of local defects in very thin silicon dioxide films on arsenic-implanted p-type silicon. Proceedings of the International Symposium on the Physical 7 Failure Analysis of Integrated Circuits, IPFA : 135-139. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/81602 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Proceedings of the International Symposium on the Physical 7 Failure Analysis of Integrated Circuits, IPFA
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Lau, W.S. Pey, K.S. Ng, W.T. Sane, V. Heng, J.M.C. Phang, J.C.H. Chan, D.S.H. Chua, C.M. Cronquist, B. Lee, Bob
format	Conference or Workshop Item
author	Lau, W.S. Pey, K.S. Ng, W.T. Sane, V. Heng, J.M.C. Phang, J.C.H. Chan, D.S.H. Chua, C.M. Cronquist, B. Lee, Bob
spellingShingle	Lau, W.S. Pey, K.S. Ng, W.T. Sane, V. Heng, J.M.C. Phang, J.C.H. Chan, D.S.H. Chua, C.M. Cronquist, B. Lee, Bob New type of local defects in very thin silicon dioxide films on arsenic-implanted p-type silicon
author_sort	Lau, W.S.
title	New type of local defects in very thin silicon dioxide films on arsenic-implanted p-type silicon
title_short	New type of local defects in very thin silicon dioxide films on arsenic-implanted p-type silicon
title_full	New type of local defects in very thin silicon dioxide films on arsenic-implanted p-type silicon
title_fullStr	New type of local defects in very thin silicon dioxide films on arsenic-implanted p-type silicon
title_full_unstemmed	New type of local defects in very thin silicon dioxide films on arsenic-implanted p-type silicon
title_sort	new type of local defects in very thin silicon dioxide films on arsenic-implanted p-type silicon
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/81602
_version_	1681089101106774016

New type of local defects in very thin silicon dioxide films on arsenic-implanted p-type silicon

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