Accurate characterization of thin films on rough surfaces by spectroscopic ellipsometry

Accurate characterization of thin films on rough surfaces by spectroscopic ellipsometry

10.1016/j.tsf.2013.07.067

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Bibliographic Details
Main Authors: Siah, S.C., Hoex, B., Aberle, A.G.
Other Authors: SOLAR ENERGY RESEARCH INST OF S'PORE
Format: Article
Published: 2014
Subjects:
Antireflection coating
Depolarization
Rough surfaces
Silicon nitride
Spectroscopic ellipsometry
Thin film properties
Online Access:http://scholarbank.nus.edu.sg/handle/10635/81928
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Institution: National University of Singapore
Description
Summary:10.1016/j.tsf.2013.07.067

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