Accurate characterization of thin films on rough surfaces by spectroscopic ellipsometry

10.1016/j.tsf.2013.07.067

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Bibliographic Details
Main Authors:	Siah, S.C., Hoex, B., Aberle, A.G.
Other Authors:	SOLAR ENERGY RESEARCH INST OF S'PORE
Format:	Article
Published:	2014
Subjects:	Antireflection coating Depolarization Rough surfaces Silicon nitride Spectroscopic ellipsometry Thin film properties
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/81928
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-81928
record_format	dspace
spelling	sg-nus-scholar.10635-819282023-10-29T22:20:24Z Accurate characterization of thin films on rough surfaces by spectroscopic ellipsometry Siah, S.C. Hoex, B. Aberle, A.G. SOLAR ENERGY RESEARCH INST OF S'PORE ELECTRICAL & COMPUTER ENGINEERING Antireflection coating Depolarization Rough surfaces Silicon nitride Spectroscopic ellipsometry Thin film properties 10.1016/j.tsf.2013.07.067 Thin Solid Films 545 451-457 THSFA 2014-10-07T04:23:21Z 2014-10-07T04:23:21Z 2013-10-31 Article Siah, S.C., Hoex, B., Aberle, A.G. (2013-10-31). Accurate characterization of thin films on rough surfaces by spectroscopic ellipsometry. Thin Solid Films 545 : 451-457. ScholarBank@NUS Repository. https://doi.org/10.1016/j.tsf.2013.07.067 00406090 http://scholarbank.nus.edu.sg/handle/10635/81928 000324820800073 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Antireflection coating Depolarization Rough surfaces Silicon nitride Spectroscopic ellipsometry Thin film properties
spellingShingle	Antireflection coating Depolarization Rough surfaces Silicon nitride Spectroscopic ellipsometry Thin film properties Siah, S.C. Hoex, B. Aberle, A.G. Accurate characterization of thin films on rough surfaces by spectroscopic ellipsometry
description	10.1016/j.tsf.2013.07.067
author2	SOLAR ENERGY RESEARCH INST OF S'PORE
author_facet	SOLAR ENERGY RESEARCH INST OF S'PORE Siah, S.C. Hoex, B. Aberle, A.G.
format	Article
author	Siah, S.C. Hoex, B. Aberle, A.G.
author_sort	Siah, S.C.
title	Accurate characterization of thin films on rough surfaces by spectroscopic ellipsometry
title_short	Accurate characterization of thin films on rough surfaces by spectroscopic ellipsometry
title_full	Accurate characterization of thin films on rough surfaces by spectroscopic ellipsometry
title_fullStr	Accurate characterization of thin films on rough surfaces by spectroscopic ellipsometry
title_full_unstemmed	Accurate characterization of thin films on rough surfaces by spectroscopic ellipsometry
title_sort	accurate characterization of thin films on rough surfaces by spectroscopic ellipsometry
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/81928
_version_	1781784019059343360

Accurate characterization of thin films on rough surfaces by spectroscopic ellipsometry

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