Dewetting of resist/metal bilayers in resist stripping processes

10.1063/1.1374234

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Bibliographic Details
Main Authors:	Wu, Y., Qiao, P., Chong, T., Low, T.-S., Xie, H., Luo, P., Guo, Z., Qiu, J.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/82151
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-82151
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spelling	sg-nus-scholar.10635-821512023-10-27T07:59:06Z Dewetting of resist/metal bilayers in resist stripping processes Wu, Y. Qiao, P. Chong, T. Low, T.-S. Xie, H. Luo, P. Guo, Z. Qiu, J. ELECTRICAL & COMPUTER ENGINEERING 10.1063/1.1374234 Applied Physics Letters 78 21 3361-3363 APPLA 2014-10-07T04:26:00Z 2014-10-07T04:26:00Z 2001-05-21 Article Wu, Y., Qiao, P., Chong, T., Low, T.-S., Xie, H., Luo, P., Guo, Z., Qiu, J. (2001-05-21). Dewetting of resist/metal bilayers in resist stripping processes. Applied Physics Letters 78 (21) : 3361-3363. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1374234 00036951 http://scholarbank.nus.edu.sg/handle/10635/82151 000168721200067 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1063/1.1374234
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Wu, Y. Qiao, P. Chong, T. Low, T.-S. Xie, H. Luo, P. Guo, Z. Qiu, J.
format	Article
author	Wu, Y. Qiao, P. Chong, T. Low, T.-S. Xie, H. Luo, P. Guo, Z. Qiu, J.
spellingShingle	Wu, Y. Qiao, P. Chong, T. Low, T.-S. Xie, H. Luo, P. Guo, Z. Qiu, J. Dewetting of resist/metal bilayers in resist stripping processes
author_sort	Wu, Y.
title	Dewetting of resist/metal bilayers in resist stripping processes
title_short	Dewetting of resist/metal bilayers in resist stripping processes
title_full	Dewetting of resist/metal bilayers in resist stripping processes
title_fullStr	Dewetting of resist/metal bilayers in resist stripping processes
title_full_unstemmed	Dewetting of resist/metal bilayers in resist stripping processes
title_sort	dewetting of resist/metal bilayers in resist stripping processes
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/82151
_version_	1781784069705564160

Dewetting of resist/metal bilayers in resist stripping processes

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