Dewetting of resist/metal bilayers in resist stripping processes
10.1063/1.1374234
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Main Authors: | Wu, Y., Qiao, P., Chong, T., Low, T.-S., Xie, H., Luo, P., Guo, Z., Qiu, J. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/82151 |
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Institution: | National University of Singapore |
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