Effect of current direction on the lifetime of different levels of Cu dual-damascene metallization
10.1063/1.1428410
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2014
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sg-nus-scholar.10635-821942024-11-11T14:21:44Z Effect of current direction on the lifetime of different levels of Cu dual-damascene metallization Gan, C.L. Thompson, C.V. Pey, K.L. Choi, W.K. Tay, H.L. Yu, B. Radhakrishnan, M.K. ELECTRICAL & COMPUTER ENGINEERING 10.1063/1.1428410 Applied Physics Letters 79 27 4592-4594 APPLA 2014-10-07T04:26:29Z 2014-10-07T04:26:29Z 2001-12-31 Article Gan, C.L., Thompson, C.V., Pey, K.L., Choi, W.K., Tay, H.L., Yu, B., Radhakrishnan, M.K. (2001-12-31). Effect of current direction on the lifetime of different levels of Cu dual-damascene metallization. Applied Physics Letters 79 (27) : 4592-4594. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1428410 00036951 http://scholarbank.nus.edu.sg/handle/10635/82194 000172835400039 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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| description |
10.1063/1.1428410 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Gan, C.L. Thompson, C.V. Pey, K.L. Choi, W.K. Tay, H.L. Yu, B. Radhakrishnan, M.K. |
| format |
Article |
| author |
Gan, C.L. Thompson, C.V. Pey, K.L. Choi, W.K. Tay, H.L. Yu, B. Radhakrishnan, M.K. |
| spellingShingle |
Gan, C.L. Thompson, C.V. Pey, K.L. Choi, W.K. Tay, H.L. Yu, B. Radhakrishnan, M.K. Effect of current direction on the lifetime of different levels of Cu dual-damascene metallization |
| author_sort |
Gan, C.L. |
| title |
Effect of current direction on the lifetime of different levels of Cu dual-damascene metallization |
| title_short |
Effect of current direction on the lifetime of different levels of Cu dual-damascene metallization |
| title_full |
Effect of current direction on the lifetime of different levels of Cu dual-damascene metallization |
| title_fullStr |
Effect of current direction on the lifetime of different levels of Cu dual-damascene metallization |
| title_full_unstemmed |
Effect of current direction on the lifetime of different levels of Cu dual-damascene metallization |
| title_sort |
effect of current direction on the lifetime of different levels of cu dual-damascene metallization |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/82194 |
| _version_ |
1821234305628635136 |