Effect of surface treatment on dielectric leakage and breakdown of copper damascene interconnects
10.1016/j.tsf.2004.05.093
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2014
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sg-nus-scholar.10635-822142023-10-26T22:01:42Z Effect of surface treatment on dielectric leakage and breakdown of copper damascene interconnects Ngwan, V.C. Zhu, C. Krishnamoorthy, A. ELECTRICAL & COMPUTER ENGINEERING Cu interconnects Damascene Intra-level dielectric leakage Surface treatment TDDB 10.1016/j.tsf.2004.05.093 Thin Solid Films 462-463 SPEC. ISS. 321-324 THSFA 2014-10-07T04:26:43Z 2014-10-07T04:26:43Z 2004-09 Article Ngwan, V.C., Zhu, C., Krishnamoorthy, A. (2004-09). Effect of surface treatment on dielectric leakage and breakdown of copper damascene interconnects. Thin Solid Films 462-463 (SPEC. ISS.) : 321-324. ScholarBank@NUS Repository. https://doi.org/10.1016/j.tsf.2004.05.093 00406090 http://scholarbank.nus.edu.sg/handle/10635/82214 000223812800066 Scopus |
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National University of Singapore |
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NUS Library |
| continent |
Asia |
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Singapore Singapore |
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NUS Library |
| collection |
ScholarBank@NUS |
| topic |
Cu interconnects Damascene Intra-level dielectric leakage Surface treatment TDDB |
| spellingShingle |
Cu interconnects Damascene Intra-level dielectric leakage Surface treatment TDDB Ngwan, V.C. Zhu, C. Krishnamoorthy, A. Effect of surface treatment on dielectric leakage and breakdown of copper damascene interconnects |
| description |
10.1016/j.tsf.2004.05.093 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Ngwan, V.C. Zhu, C. Krishnamoorthy, A. |
| format |
Article |
| author |
Ngwan, V.C. Zhu, C. Krishnamoorthy, A. |
| author_sort |
Ngwan, V.C. |
| title |
Effect of surface treatment on dielectric leakage and breakdown of copper damascene interconnects |
| title_short |
Effect of surface treatment on dielectric leakage and breakdown of copper damascene interconnects |
| title_full |
Effect of surface treatment on dielectric leakage and breakdown of copper damascene interconnects |
| title_fullStr |
Effect of surface treatment on dielectric leakage and breakdown of copper damascene interconnects |
| title_full_unstemmed |
Effect of surface treatment on dielectric leakage and breakdown of copper damascene interconnects |
| title_sort |
effect of surface treatment on dielectric leakage and breakdown of copper damascene interconnects |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/82214 |
| _version_ |
1781784082678546432 |