Effective modulation of quadratic voltage coefficient of capacitance in MIM capacitors using Sm2O3SiO2 dielectric stack

• Main Authors: Yang, J.-J., Chen, J.-D., Wise, R., Steinmann, P., Yu, M.-B., Kwong, D.-L., Li, M.-F., Yeo, Y.-C., Zhu, C.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Article
• Published: 2014
• Subjects: Canceling effect; Capacitor; Mmetal-insulator-metal (MIM); Quadratic voltage coefficient of capacitance (VCC); SiO2; Sm2O3
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/82216
• Institution: National University of Singapore

10.1109/LED.2009.2015970