Effective modulation of quadratic voltage coefficient of capacitance in MIM capacitors using Sm2O3SiO2 dielectric stack

10.1109/LED.2009.2015970

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Bibliographic Details
Main Authors:	Yang, J.-J., Chen, J.-D., Wise, R., Steinmann, P., Yu, M.-B., Kwong, D.-L., Li, M.-F., Yeo, Y.-C., Zhu, C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Canceling effect Capacitor Mmetal-insulator-metal (MIM) Quadratic voltage coefficient of capacitance (VCC) SiO2 Sm2O3
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/82216
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-82216
record_format	dspace
spelling	sg-nus-scholar.10635-822162024-11-13T14:46:49Z Effective modulation of quadratic voltage coefficient of capacitance in MIM capacitors using Sm2O3SiO2 dielectric stack Yang, J.-J. Chen, J.-D. Wise, R. Steinmann, P. Yu, M.-B. Kwong, D.-L. Li, M.-F. Yeo, Y.-C. Zhu, C. ELECTRICAL & COMPUTER ENGINEERING Canceling effect Capacitor Mmetal-insulator-metal (MIM) Quadratic voltage coefficient of capacitance (VCC) SiO2 Sm2O3 10.1109/LED.2009.2015970 IEEE Electron Device Letters 30 5 460-462 EDLED 2014-10-07T04:26:45Z 2014-10-07T04:26:45Z 2009 Article Yang, J.-J., Chen, J.-D., Wise, R., Steinmann, P., Yu, M.-B., Kwong, D.-L., Li, M.-F., Yeo, Y.-C., Zhu, C. (2009). Effective modulation of quadratic voltage coefficient of capacitance in MIM capacitors using Sm2O3SiO2 dielectric stack. IEEE Electron Device Letters 30 (5) : 460-462. ScholarBank@NUS Repository. https://doi.org/10.1109/LED.2009.2015970 07413106 http://scholarbank.nus.edu.sg/handle/10635/82216 000265711700012 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Canceling effect Capacitor Mmetal-insulator-metal (MIM) Quadratic voltage coefficient of capacitance (VCC) SiO2 Sm2O3
spellingShingle	Canceling effect Capacitor Mmetal-insulator-metal (MIM) Quadratic voltage coefficient of capacitance (VCC) SiO2 Sm2O3 Yang, J.-J. Chen, J.-D. Wise, R. Steinmann, P. Yu, M.-B. Kwong, D.-L. Li, M.-F. Yeo, Y.-C. Zhu, C. Effective modulation of quadratic voltage coefficient of capacitance in MIM capacitors using Sm2O3SiO2 dielectric stack
description	10.1109/LED.2009.2015970
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Yang, J.-J. Chen, J.-D. Wise, R. Steinmann, P. Yu, M.-B. Kwong, D.-L. Li, M.-F. Yeo, Y.-C. Zhu, C.
format	Article
author	Yang, J.-J. Chen, J.-D. Wise, R. Steinmann, P. Yu, M.-B. Kwong, D.-L. Li, M.-F. Yeo, Y.-C. Zhu, C.
author_sort	Yang, J.-J.
title	Effective modulation of quadratic voltage coefficient of capacitance in MIM capacitors using Sm2O3SiO2 dielectric stack
title_short	Effective modulation of quadratic voltage coefficient of capacitance in MIM capacitors using Sm2O3SiO2 dielectric stack
title_full	Effective modulation of quadratic voltage coefficient of capacitance in MIM capacitors using Sm2O3SiO2 dielectric stack
title_fullStr	Effective modulation of quadratic voltage coefficient of capacitance in MIM capacitors using Sm2O3SiO2 dielectric stack
title_full_unstemmed	Effective modulation of quadratic voltage coefficient of capacitance in MIM capacitors using Sm2O3SiO2 dielectric stack
title_sort	effective modulation of quadratic voltage coefficient of capacitance in mim capacitors using sm2o3sio2 dielectric stack
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/82216
_version_	1821204868203806720

Effective modulation of quadratic voltage coefficient of capacitance in MIM capacitors using Sm2O3SiO2 dielectric stack

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