Etching of TiN-based gates for advanced complementary metal-oxide- semiconductor devices
10.1116/1.2953732
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2014
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sg-nus-scholar.10635-823002023-10-30T23:02:34Z Etching of TiN-based gates for advanced complementary metal-oxide- semiconductor devices Bliznetsov, V. Singh, N. Kumar, R. Balasubramanian, N. Guo, P. Lee, S.J. Cai, Y. ELECTRICAL & COMPUTER ENGINEERING 10.1116/1.2953732 Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 26 4 1440-1444 JVTBD 2014-10-07T04:27:45Z 2014-10-07T04:27:45Z 2008 Article Bliznetsov, V., Singh, N., Kumar, R., Balasubramanian, N., Guo, P., Lee, S.J., Cai, Y. (2008). Etching of TiN-based gates for advanced complementary metal-oxide- semiconductor devices. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 26 (4) : 1440-1444. ScholarBank@NUS Repository. https://doi.org/10.1116/1.2953732 10711023 http://scholarbank.nus.edu.sg/handle/10635/82300 000258494400033 Scopus |
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National University of Singapore |
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Asia |
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Singapore Singapore |
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| description |
10.1116/1.2953732 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Bliznetsov, V. Singh, N. Kumar, R. Balasubramanian, N. Guo, P. Lee, S.J. Cai, Y. |
| format |
Article |
| author |
Bliznetsov, V. Singh, N. Kumar, R. Balasubramanian, N. Guo, P. Lee, S.J. Cai, Y. |
| spellingShingle |
Bliznetsov, V. Singh, N. Kumar, R. Balasubramanian, N. Guo, P. Lee, S.J. Cai, Y. Etching of TiN-based gates for advanced complementary metal-oxide- semiconductor devices |
| author_sort |
Bliznetsov, V. |
| title |
Etching of TiN-based gates for advanced complementary metal-oxide- semiconductor devices |
| title_short |
Etching of TiN-based gates for advanced complementary metal-oxide- semiconductor devices |
| title_full |
Etching of TiN-based gates for advanced complementary metal-oxide- semiconductor devices |
| title_fullStr |
Etching of TiN-based gates for advanced complementary metal-oxide- semiconductor devices |
| title_full_unstemmed |
Etching of TiN-based gates for advanced complementary metal-oxide- semiconductor devices |
| title_sort |
etching of tin-based gates for advanced complementary metal-oxide- semiconductor devices |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/82300 |
| _version_ |
1781784103588200448 |