Formation of dual-phase HfO 2-Hf xSi 1-xO 2 dielectric and its application in memory devices

10.1063/1.1954870

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Bibliographic Details
Main Authors:	Wang, Y.Q., Chen, J.H., Yoo, W.J., Yeo, Y.-C., Chin, A., Du, A.Y.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/82372
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-82372
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spelling	sg-nus-scholar.10635-823722023-10-25T21:06:43Z Formation of dual-phase HfO 2-Hf xSi 1-xO 2 dielectric and its application in memory devices Wang, Y.Q. Chen, J.H. Yoo, W.J. Yeo, Y.-C. Chin, A. Du, A.Y. ELECTRICAL & COMPUTER ENGINEERING 10.1063/1.1954870 Journal of Applied Physics 98 1 - JAPIA 2014-10-07T04:28:35Z 2014-10-07T04:28:35Z 2005-07-01 Article Wang, Y.Q., Chen, J.H., Yoo, W.J., Yeo, Y.-C., Chin, A., Du, A.Y. (2005-07-01). Formation of dual-phase HfO 2-Hf xSi 1-xO 2 dielectric and its application in memory devices. Journal of Applied Physics 98 (1) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1954870 00218979 http://scholarbank.nus.edu.sg/handle/10635/82372 000231062200046 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1063/1.1954870
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Wang, Y.Q. Chen, J.H. Yoo, W.J. Yeo, Y.-C. Chin, A. Du, A.Y.
format	Article
author	Wang, Y.Q. Chen, J.H. Yoo, W.J. Yeo, Y.-C. Chin, A. Du, A.Y.
spellingShingle	Wang, Y.Q. Chen, J.H. Yoo, W.J. Yeo, Y.-C. Chin, A. Du, A.Y. Formation of dual-phase HfO 2-Hf xSi 1-xO 2 dielectric and its application in memory devices
author_sort	Wang, Y.Q.
title	Formation of dual-phase HfO 2-Hf xSi 1-xO 2 dielectric and its application in memory devices
title_short	Formation of dual-phase HfO 2-Hf xSi 1-xO 2 dielectric and its application in memory devices
title_full	Formation of dual-phase HfO 2-Hf xSi 1-xO 2 dielectric and its application in memory devices
title_fullStr	Formation of dual-phase HfO 2-Hf xSi 1-xO 2 dielectric and its application in memory devices
title_full_unstemmed	Formation of dual-phase HfO 2-Hf xSi 1-xO 2 dielectric and its application in memory devices
title_sort	formation of dual-phase hfo 2-hf xsi 1-xo 2 dielectric and its application in memory devices
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/82372
_version_	1781784121141362688

Formation of dual-phase HfO 2-Hf xSi 1-xO 2 dielectric and its application in memory devices

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