Gate dielectrics on strained-Si/SiGe heterolayers
10.1016/j.sse.2004.02.014
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2014
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sg-nus-scholar.10635-823992024-11-13T03:44:07Z Gate dielectrics on strained-Si/SiGe heterolayers Maiti, C.K. Samanta, S.K. Chatterjee, S. Dalapati, G.K. Bera, L.K. ELECTRICAL & COMPUTER ENGINEERING High-k gate dielectric Microwave plasma Oxidation Strained-Si 10.1016/j.sse.2004.02.014 Solid-State Electronics 48 8 1369-1389 SSELA 2014-10-07T04:28:55Z 2014-10-07T04:28:55Z 2004-08 Article Maiti, C.K., Samanta, S.K., Chatterjee, S., Dalapati, G.K., Bera, L.K. (2004-08). Gate dielectrics on strained-Si/SiGe heterolayers. Solid-State Electronics 48 (8) : 1369-1389. ScholarBank@NUS Repository. https://doi.org/10.1016/j.sse.2004.02.014 00381101 http://scholarbank.nus.edu.sg/handle/10635/82399 000221578700013 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| topic |
High-k gate dielectric Microwave plasma Oxidation Strained-Si |
| spellingShingle |
High-k gate dielectric Microwave plasma Oxidation Strained-Si Maiti, C.K. Samanta, S.K. Chatterjee, S. Dalapati, G.K. Bera, L.K. Gate dielectrics on strained-Si/SiGe heterolayers |
| description |
10.1016/j.sse.2004.02.014 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Maiti, C.K. Samanta, S.K. Chatterjee, S. Dalapati, G.K. Bera, L.K. |
| format |
Article |
| author |
Maiti, C.K. Samanta, S.K. Chatterjee, S. Dalapati, G.K. Bera, L.K. |
| author_sort |
Maiti, C.K. |
| title |
Gate dielectrics on strained-Si/SiGe heterolayers |
| title_short |
Gate dielectrics on strained-Si/SiGe heterolayers |
| title_full |
Gate dielectrics on strained-Si/SiGe heterolayers |
| title_fullStr |
Gate dielectrics on strained-Si/SiGe heterolayers |
| title_full_unstemmed |
Gate dielectrics on strained-Si/SiGe heterolayers |
| title_sort |
gate dielectrics on strained-si/sige heterolayers |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/82399 |
| _version_ |
1821228201603497984 |