Germanium incorporation in Hf O2 dielectric on germanium substrate

10.1149/1.2160432

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Bibliographic Details
Main Authors:	Zhang, Q., Wu, N., Lai, D.M.Y., Nikolai, Y., Bera, L.K., Zhu, C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/82410
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-82410
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spelling	sg-nus-scholar.10635-824102023-10-26T08:58:12Z Germanium incorporation in Hf O2 dielectric on germanium substrate Zhang, Q. Wu, N. Lai, D.M.Y. Nikolai, Y. Bera, L.K. Zhu, C. ELECTRICAL & COMPUTER ENGINEERING 10.1149/1.2160432 Journal of the Electrochemical Society 153 3 G207-G210 JESOA 2014-10-07T04:29:04Z 2014-10-07T04:29:04Z 2006 Article Zhang, Q., Wu, N., Lai, D.M.Y., Nikolai, Y., Bera, L.K., Zhu, C. (2006). Germanium incorporation in Hf O2 dielectric on germanium substrate. Journal of the Electrochemical Society 153 (3) : G207-G210. ScholarBank@NUS Repository. https://doi.org/10.1149/1.2160432 00134651 http://scholarbank.nus.edu.sg/handle/10635/82410 000235136600065 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1149/1.2160432
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Zhang, Q. Wu, N. Lai, D.M.Y. Nikolai, Y. Bera, L.K. Zhu, C.
format	Article
author	Zhang, Q. Wu, N. Lai, D.M.Y. Nikolai, Y. Bera, L.K. Zhu, C.
spellingShingle	Zhang, Q. Wu, N. Lai, D.M.Y. Nikolai, Y. Bera, L.K. Zhu, C. Germanium incorporation in Hf O2 dielectric on germanium substrate
author_sort	Zhang, Q.
title	Germanium incorporation in Hf O2 dielectric on germanium substrate
title_short	Germanium incorporation in Hf O2 dielectric on germanium substrate
title_full	Germanium incorporation in Hf O2 dielectric on germanium substrate
title_fullStr	Germanium incorporation in Hf O2 dielectric on germanium substrate
title_full_unstemmed	Germanium incorporation in Hf O2 dielectric on germanium substrate
title_sort	germanium incorporation in hf o2 dielectric on germanium substrate
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/82410
_version_	1781784130463203328

Germanium incorporation in Hf O2 dielectric on germanium substrate

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