Germanium incorporation in Hf O2 dielectric on germanium substrate

• Main Authors: Zhang, Q., Wu, N., Lai, D.M.Y., Nikolai, Y., Bera, L.K., Zhu, C.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Article
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/82410
• Institution: National University of Singapore

10.1149/1.2160432