High germanium content strained SGOI by oxidation of amorphous SiGe film on SOI substrates

10.1149/1.2087167

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Bibliographic Details
Main Authors: Gao, F., Balakumar, S., Balasubramanian, N., Lee, S.J., Tung, C.H., Kumar, R., Sudhiranjan, T., Foo, Y.L., Kwong, D.-L.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/82449
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-824492024-11-10T21:13:24Z High germanium content strained SGOI by oxidation of amorphous SiGe film on SOI substrates Gao, F. Balakumar, S. Balasubramanian, N. Lee, S.J. Tung, C.H. Kumar, R. Sudhiranjan, T. Foo, Y.L. Kwong, D.-L. ELECTRICAL & COMPUTER ENGINEERING 10.1149/1.2087167 Electrochemical and Solid-State Letters 8 12 G337-G340 ESLEF 2014-10-07T04:29:31Z 2014-10-07T04:29:31Z 2005 Article Gao, F., Balakumar, S., Balasubramanian, N., Lee, S.J., Tung, C.H., Kumar, R., Sudhiranjan, T., Foo, Y.L., Kwong, D.-L. (2005). High germanium content strained SGOI by oxidation of amorphous SiGe film on SOI substrates. Electrochemical and Solid-State Letters 8 (12) : G337-G340. ScholarBank@NUS Repository. https://doi.org/10.1149/1.2087167 10990062 http://scholarbank.nus.edu.sg/handle/10635/82449 000232697800021 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
description 10.1149/1.2087167
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Gao, F.
Balakumar, S.
Balasubramanian, N.
Lee, S.J.
Tung, C.H.
Kumar, R.
Sudhiranjan, T.
Foo, Y.L.
Kwong, D.-L.
format Article
author Gao, F.
Balakumar, S.
Balasubramanian, N.
Lee, S.J.
Tung, C.H.
Kumar, R.
Sudhiranjan, T.
Foo, Y.L.
Kwong, D.-L.
spellingShingle Gao, F.
Balakumar, S.
Balasubramanian, N.
Lee, S.J.
Tung, C.H.
Kumar, R.
Sudhiranjan, T.
Foo, Y.L.
Kwong, D.-L.
High germanium content strained SGOI by oxidation of amorphous SiGe film on SOI substrates
author_sort Gao, F.
title High germanium content strained SGOI by oxidation of amorphous SiGe film on SOI substrates
title_short High germanium content strained SGOI by oxidation of amorphous SiGe film on SOI substrates
title_full High germanium content strained SGOI by oxidation of amorphous SiGe film on SOI substrates
title_fullStr High germanium content strained SGOI by oxidation of amorphous SiGe film on SOI substrates
title_full_unstemmed High germanium content strained SGOI by oxidation of amorphous SiGe film on SOI substrates
title_sort high germanium content strained sgoi by oxidation of amorphous sige film on soi substrates
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/82449
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