High-performance MIM capacitors using HfLaO-based dielectrics

10.1109/LED.2009.2034545

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Bibliographic Details
Main Authors:	Zhang, L., He, W., Chan, D.S.H., Cho, B.J.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Hafnium oxide High-ê dielectric Lanthanum oxide Metal'insulator'metal (MIM) Multilayer dielectric structure
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/82466
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-82466
record_format	dspace
spelling	sg-nus-scholar.10635-824662024-11-11T07:32:43Z High-performance MIM capacitors using HfLaO-based dielectrics Zhang, L. He, W. Chan, D.S.H. Cho, B.J. ELECTRICAL & COMPUTER ENGINEERING Hafnium oxide High-ê dielectric Lanthanum oxide Metal'insulator'metal (MIM) Multilayer dielectric structure 10.1109/LED.2009.2034545 IEEE Electron Device Letters 31 1 17-19 EDLED 2014-10-07T04:29:44Z 2014-10-07T04:29:44Z 2010-01 Article Zhang, L., He, W., Chan, D.S.H., Cho, B.J. (2010-01). High-performance MIM capacitors using HfLaO-based dielectrics. IEEE Electron Device Letters 31 (1) : 17-19. ScholarBank@NUS Repository. https://doi.org/10.1109/LED.2009.2034545 07413106 http://scholarbank.nus.edu.sg/handle/10635/82466 000273090800007 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Hafnium oxide High-ê dielectric Lanthanum oxide Metal'insulator'metal (MIM) Multilayer dielectric structure
spellingShingle	Hafnium oxide High-ê dielectric Lanthanum oxide Metal'insulator'metal (MIM) Multilayer dielectric structure Zhang, L. He, W. Chan, D.S.H. Cho, B.J. High-performance MIM capacitors using HfLaO-based dielectrics
description	10.1109/LED.2009.2034545
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Zhang, L. He, W. Chan, D.S.H. Cho, B.J.
format	Article
author	Zhang, L. He, W. Chan, D.S.H. Cho, B.J.
author_sort	Zhang, L.
title	High-performance MIM capacitors using HfLaO-based dielectrics
title_short	High-performance MIM capacitors using HfLaO-based dielectrics
title_full	High-performance MIM capacitors using HfLaO-based dielectrics
title_fullStr	High-performance MIM capacitors using HfLaO-based dielectrics
title_full_unstemmed	High-performance MIM capacitors using HfLaO-based dielectrics
title_sort	high-performance mim capacitors using hflao-based dielectrics
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/82466
_version_	1821233444815896576

High-performance MIM capacitors using HfLaO-based dielectrics

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