Improvements on surface carrier mobility and electrical stability of MOSFETs using HfTaO gate dielectric

10.1109/TED.2004.839114

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Bibliographic Details
Main Authors:	Yu, X., Zhu, C., Yu, M., Kwong, D.-L.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Crystallization temperature Electrical stability HfO2 HfTaO High-K Interface states density (Dit) Mobility MOSFET Vth shift
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/82512
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-82512
record_format	dspace
spelling	sg-nus-scholar.10635-825122023-10-26T20:32:18Z Improvements on surface carrier mobility and electrical stability of MOSFETs using HfTaO gate dielectric Yu, X. Zhu, C. Yu, M. Kwong, D.-L. ELECTRICAL & COMPUTER ENGINEERING Crystallization temperature Electrical stability HfO2 HfTaO High-K Interface states density (Dit) Mobility MOSFET Vth shift 10.1109/TED.2004.839114 IEEE Transactions on Electron Devices 51 12 2154-2160 IETDA 2014-10-07T04:30:15Z 2014-10-07T04:30:15Z 2004-12 Article Yu, X., Zhu, C., Yu, M., Kwong, D.-L. (2004-12). Improvements on surface carrier mobility and electrical stability of MOSFETs using HfTaO gate dielectric. IEEE Transactions on Electron Devices 51 (12) : 2154-2160. ScholarBank@NUS Repository. https://doi.org/10.1109/TED.2004.839114 00189383 http://scholarbank.nus.edu.sg/handle/10635/82512 000225362900028 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Crystallization temperature Electrical stability HfO2 HfTaO High-K Interface states density (Dit) Mobility MOSFET Vth shift
spellingShingle	Crystallization temperature Electrical stability HfO2 HfTaO High-K Interface states density (Dit) Mobility MOSFET Vth shift Yu, X. Zhu, C. Yu, M. Kwong, D.-L. Improvements on surface carrier mobility and electrical stability of MOSFETs using HfTaO gate dielectric
description	10.1109/TED.2004.839114
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Yu, X. Zhu, C. Yu, M. Kwong, D.-L.
format	Article
author	Yu, X. Zhu, C. Yu, M. Kwong, D.-L.
author_sort	Yu, X.
title	Improvements on surface carrier mobility and electrical stability of MOSFETs using HfTaO gate dielectric
title_short	Improvements on surface carrier mobility and electrical stability of MOSFETs using HfTaO gate dielectric
title_full	Improvements on surface carrier mobility and electrical stability of MOSFETs using HfTaO gate dielectric
title_fullStr	Improvements on surface carrier mobility and electrical stability of MOSFETs using HfTaO gate dielectric
title_full_unstemmed	Improvements on surface carrier mobility and electrical stability of MOSFETs using HfTaO gate dielectric
title_sort	improvements on surface carrier mobility and electrical stability of mosfets using hftao gate dielectric
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/82512
_version_	1781784159442698240

Improvements on surface carrier mobility and electrical stability of MOSFETs using HfTaO gate dielectric

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