Laser-induced titanium disilicide formation for submicron technologies
Journal of Electronic Materials
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2014
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sg-nus-scholar.10635-826102024-11-13T12:46:21Z Laser-induced titanium disilicide formation for submicron technologies Chong, Y.F. Pey, K.L. Wee, A.T.S. See, A. Shen, Z.X. Tung, C.-H. Gopalakrishnan, R. Lu, Y.F. INSTITUTE OF MICROELECTRONICS ELECTRICAL & COMPUTER ENGINEERING PHYSICS Laser annealing Rapid thermal annealing Titanium disilicide Journal of Electronic Materials 30 12 1549-1553 JECMA 2014-10-07T04:31:24Z 2014-10-07T04:31:24Z 2001-12 Article Chong, Y.F.,Pey, K.L.,Wee, A.T.S.,See, A.,Shen, Z.X.,Tung, C.-H.,Gopalakrishnan, R.,Lu, Y.F. (2001-12). Laser-induced titanium disilicide formation for submicron technologies. Journal of Electronic Materials 30 (12) : 1549-1553. ScholarBank@NUS Repository. 03615235 http://scholarbank.nus.edu.sg/handle/10635/82610 NOT_IN_WOS Scopus |
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National University of Singapore |
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NUS Library |
| continent |
Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| topic |
Laser annealing Rapid thermal annealing Titanium disilicide |
| spellingShingle |
Laser annealing Rapid thermal annealing Titanium disilicide Chong, Y.F. Pey, K.L. Wee, A.T.S. See, A. Shen, Z.X. Tung, C.-H. Gopalakrishnan, R. Lu, Y.F. Laser-induced titanium disilicide formation for submicron technologies |
| description |
Journal of Electronic Materials |
| author2 |
INSTITUTE OF MICROELECTRONICS |
| author_facet |
INSTITUTE OF MICROELECTRONICS Chong, Y.F. Pey, K.L. Wee, A.T.S. See, A. Shen, Z.X. Tung, C.-H. Gopalakrishnan, R. Lu, Y.F. |
| format |
Article |
| author |
Chong, Y.F. Pey, K.L. Wee, A.T.S. See, A. Shen, Z.X. Tung, C.-H. Gopalakrishnan, R. Lu, Y.F. |
| author_sort |
Chong, Y.F. |
| title |
Laser-induced titanium disilicide formation for submicron technologies |
| title_short |
Laser-induced titanium disilicide formation for submicron technologies |
| title_full |
Laser-induced titanium disilicide formation for submicron technologies |
| title_fullStr |
Laser-induced titanium disilicide formation for submicron technologies |
| title_full_unstemmed |
Laser-induced titanium disilicide formation for submicron technologies |
| title_sort |
laser-induced titanium disilicide formation for submicron technologies |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/82610 |
| _version_ |
1821187859570229248 |