Laser-induced titanium disilicide formation for submicron technologies

Journal of Electronic Materials

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Bibliographic Details
Main Authors:	Chong, Y.F., Pey, K.L., Wee, A.T.S., See, A., Shen, Z.X., Tung, C.-H., Gopalakrishnan, R., Lu, Y.F.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Laser annealing Rapid thermal annealing Titanium disilicide
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/82610
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-82610
record_format	dspace
spelling	sg-nus-scholar.10635-826102015-01-29T05:00:59Z Laser-induced titanium disilicide formation for submicron technologies Chong, Y.F. Pey, K.L. Wee, A.T.S. See, A. Shen, Z.X. Tung, C.-H. Gopalakrishnan, R. Lu, Y.F. ELECTRICAL & COMPUTER ENGINEERING INSTITUTE OF MICROELECTRONICS PHYSICS Laser annealing Rapid thermal annealing Titanium disilicide Journal of Electronic Materials 30 12 1549-1553 JECMA 2014-10-07T04:31:24Z 2014-10-07T04:31:24Z 2001-12 Article Chong, Y.F.,Pey, K.L.,Wee, A.T.S.,See, A.,Shen, Z.X.,Tung, C.-H.,Gopalakrishnan, R.,Lu, Y.F. (2001-12). Laser-induced titanium disilicide formation for submicron technologies. Journal of Electronic Materials 30 (12) : 1549-1553. ScholarBank@NUS Repository. 03615235 http://scholarbank.nus.edu.sg/handle/10635/82610 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Laser annealing Rapid thermal annealing Titanium disilicide
spellingShingle	Laser annealing Rapid thermal annealing Titanium disilicide Chong, Y.F. Pey, K.L. Wee, A.T.S. See, A. Shen, Z.X. Tung, C.-H. Gopalakrishnan, R. Lu, Y.F. Laser-induced titanium disilicide formation for submicron technologies
description	Journal of Electronic Materials
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Chong, Y.F. Pey, K.L. Wee, A.T.S. See, A. Shen, Z.X. Tung, C.-H. Gopalakrishnan, R. Lu, Y.F.
format	Article
author	Chong, Y.F. Pey, K.L. Wee, A.T.S. See, A. Shen, Z.X. Tung, C.-H. Gopalakrishnan, R. Lu, Y.F.
author_sort	Chong, Y.F.
title	Laser-induced titanium disilicide formation for submicron technologies
title_short	Laser-induced titanium disilicide formation for submicron technologies
title_full	Laser-induced titanium disilicide formation for submicron technologies
title_fullStr	Laser-induced titanium disilicide formation for submicron technologies
title_full_unstemmed	Laser-induced titanium disilicide formation for submicron technologies
title_sort	laser-induced titanium disilicide formation for submicron technologies
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/82610
_version_	1681089283867279360

Laser-induced titanium disilicide formation for submicron technologies

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