Lattice strain analysis of silicon fin field-effect transistor structures wrapped by Ge2Sb2Te5 liner stressor
10.1063/1.4792477
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sg-nus-scholar.10635-826132023-10-30T08:08:16Z Lattice strain analysis of silicon fin field-effect transistor structures wrapped by Ge2Sb2Te5 liner stressor Ding, Y. Cheng, R. Du, A. Yeo, Y.-C. ELECTRICAL & COMPUTER ENGINEERING 10.1063/1.4792477 Journal of Applied Physics 113 7 - JAPIA 2014-10-07T04:31:26Z 2014-10-07T04:31:26Z 2013-02-21 Article Ding, Y., Cheng, R., Du, A., Yeo, Y.-C. (2013-02-21). Lattice strain analysis of silicon fin field-effect transistor structures wrapped by Ge2Sb2Te5 liner stressor. Journal of Applied Physics 113 (7) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.4792477 00218979 http://scholarbank.nus.edu.sg/handle/10635/82613 000315262800028 Scopus |
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National University of Singapore |
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Asia |
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Singapore Singapore |
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| description |
10.1063/1.4792477 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Ding, Y. Cheng, R. Du, A. Yeo, Y.-C. |
| format |
Article |
| author |
Ding, Y. Cheng, R. Du, A. Yeo, Y.-C. |
| spellingShingle |
Ding, Y. Cheng, R. Du, A. Yeo, Y.-C. Lattice strain analysis of silicon fin field-effect transistor structures wrapped by Ge2Sb2Te5 liner stressor |
| author_sort |
Ding, Y. |
| title |
Lattice strain analysis of silicon fin field-effect transistor structures wrapped by Ge2Sb2Te5 liner stressor |
| title_short |
Lattice strain analysis of silicon fin field-effect transistor structures wrapped by Ge2Sb2Te5 liner stressor |
| title_full |
Lattice strain analysis of silicon fin field-effect transistor structures wrapped by Ge2Sb2Te5 liner stressor |
| title_fullStr |
Lattice strain analysis of silicon fin field-effect transistor structures wrapped by Ge2Sb2Te5 liner stressor |
| title_full_unstemmed |
Lattice strain analysis of silicon fin field-effect transistor structures wrapped by Ge2Sb2Te5 liner stressor |
| title_sort |
lattice strain analysis of silicon fin field-effect transistor structures wrapped by ge2sb2te5 liner stressor |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/82613 |
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1781784182465232896 |