A new expandible ZnS-SiO2 liner stressor for n-channel FinFETs

• Main Authors: Ding, Y., Tong, X., Zhou, Q., Liu, B., Gyanathan, A., Tong, Y., Yeo, Y.-C.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/83379
• Institution: National University of Singapore

Digest of Technical Papers - Symposium on VLSI Technology