A new expandible ZnS-SiO2 liner stressor for n-channel FinFETs

Digest of Technical Papers - Symposium on VLSI Technology

Saved in:

Bibliographic Details
Main Authors:	Ding, Y., Tong, X., Zhou, Q., Liu, B., Gyanathan, A., Tong, Y., Yeo, Y.-C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/83379
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

id	sg-nus-scholar.10635-83379
record_format	dspace
spelling	sg-nus-scholar.10635-833792015-01-06T20:47:31Z A new expandible ZnS-SiO2 liner stressor for n-channel FinFETs Ding, Y. Tong, X. Zhou, Q. Liu, B. Gyanathan, A. Tong, Y. Yeo, Y.-C. ELECTRICAL & COMPUTER ENGINEERING Digest of Technical Papers - Symposium on VLSI Technology T86-T87 DTPTE 2014-10-07T04:40:34Z 2014-10-07T04:40:34Z 2013 Conference Paper Ding, Y.,Tong, X.,Zhou, Q.,Liu, B.,Gyanathan, A.,Tong, Y.,Yeo, Y.-C. (2013). A new expandible ZnS-SiO2 liner stressor for n-channel FinFETs. Digest of Technical Papers - Symposium on VLSI Technology : T86-T87. ScholarBank@NUS Repository. 9784863483477 07431562 http://scholarbank.nus.edu.sg/handle/10635/83379 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Digest of Technical Papers - Symposium on VLSI Technology
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Ding, Y. Tong, X. Zhou, Q. Liu, B. Gyanathan, A. Tong, Y. Yeo, Y.-C.
format	Conference or Workshop Item
author	Ding, Y. Tong, X. Zhou, Q. Liu, B. Gyanathan, A. Tong, Y. Yeo, Y.-C.
spellingShingle	Ding, Y. Tong, X. Zhou, Q. Liu, B. Gyanathan, A. Tong, Y. Yeo, Y.-C. A new expandible ZnS-SiO2 liner stressor for n-channel FinFETs
author_sort	Ding, Y.
title	A new expandible ZnS-SiO2 liner stressor for n-channel FinFETs
title_short	A new expandible ZnS-SiO2 liner stressor for n-channel FinFETs
title_full	A new expandible ZnS-SiO2 liner stressor for n-channel FinFETs
title_fullStr	A new expandible ZnS-SiO2 liner stressor for n-channel FinFETs
title_full_unstemmed	A new expandible ZnS-SiO2 liner stressor for n-channel FinFETs
title_sort	new expandible zns-sio2 liner stressor for n-channel finfets
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/83379
_version_	1681089425053843456

A new expandible ZnS-SiO2 liner stressor for n-channel FinFETs

Similar Items