Morphological and structural analyses of plasma-induced damage to n-type GaN
10.1063/1.1509844
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Main Authors: | Choi, H.W., Chua, S.J., Tripathy, S. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/82721 |
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Institution: | National University of Singapore |
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