PVD HfO2 for high-precision MIM capacitor applications

10.1109/LED.2003.813381

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Bibliographic Details
Main Authors:	Kim, S.J., Cho, B.J., Li, M.F., Yu, X., Zhu, C., Chin, A., Kwong, D.-L.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Capacitance density HfO2 Metal-insulator-metal (MIM) capacitor Sputter Voltage coefficient of capacitor (VCC)
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/82950
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-82950
record_format	dspace
spelling	sg-nus-scholar.10635-829502023-10-29T22:24:39Z PVD HfO2 for high-precision MIM capacitor applications Kim, S.J. Cho, B.J. Li, M.F. Yu, X. Zhu, C. Chin, A. Kwong, D.-L. ELECTRICAL & COMPUTER ENGINEERING Capacitance density HfO2 Metal-insulator-metal (MIM) capacitor Sputter Voltage coefficient of capacitor (VCC) 10.1109/LED.2003.813381 IEEE Electron Device Letters 24 6 387-389 EDLED 2014-10-07T04:35:26Z 2014-10-07T04:35:26Z 2003-06 Article Kim, S.J., Cho, B.J., Li, M.F., Yu, X., Zhu, C., Chin, A., Kwong, D.-L. (2003-06). PVD HfO2 for high-precision MIM capacitor applications. IEEE Electron Device Letters 24 (6) : 387-389. ScholarBank@NUS Repository. https://doi.org/10.1109/LED.2003.813381 07413106 http://scholarbank.nus.edu.sg/handle/10635/82950 000184254700007 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Capacitance density HfO2 Metal-insulator-metal (MIM) capacitor Sputter Voltage coefficient of capacitor (VCC)
spellingShingle	Capacitance density HfO2 Metal-insulator-metal (MIM) capacitor Sputter Voltage coefficient of capacitor (VCC) Kim, S.J. Cho, B.J. Li, M.F. Yu, X. Zhu, C. Chin, A. Kwong, D.-L. PVD HfO2 for high-precision MIM capacitor applications
description	10.1109/LED.2003.813381
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Kim, S.J. Cho, B.J. Li, M.F. Yu, X. Zhu, C. Chin, A. Kwong, D.-L.
format	Article
author	Kim, S.J. Cho, B.J. Li, M.F. Yu, X. Zhu, C. Chin, A. Kwong, D.-L.
author_sort	Kim, S.J.
title	PVD HfO2 for high-precision MIM capacitor applications
title_short	PVD HfO2 for high-precision MIM capacitor applications
title_full	PVD HfO2 for high-precision MIM capacitor applications
title_fullStr	PVD HfO2 for high-precision MIM capacitor applications
title_full_unstemmed	PVD HfO2 for high-precision MIM capacitor applications
title_sort	pvd hfo2 for high-precision mim capacitor applications
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/82950
_version_	1781784259783032832

PVD HfO2 for high-precision MIM capacitor applications

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