PVD HfO2 for high-precision MIM capacitor applications

10.1109/LED.2003.813381

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Main Authors: Kim, S.J., Cho, B.J., Li, M.F., Yu, X., Zhu, C., Chin, A., Kwong, D.-L.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
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Online Access:http://scholarbank.nus.edu.sg/handle/10635/82950
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spelling sg-nus-scholar.10635-829502023-10-29T22:24:39Z PVD HfO2 for high-precision MIM capacitor applications Kim, S.J. Cho, B.J. Li, M.F. Yu, X. Zhu, C. Chin, A. Kwong, D.-L. ELECTRICAL & COMPUTER ENGINEERING Capacitance density HfO2 Metal-insulator-metal (MIM) capacitor Sputter Voltage coefficient of capacitor (VCC) 10.1109/LED.2003.813381 IEEE Electron Device Letters 24 6 387-389 EDLED 2014-10-07T04:35:26Z 2014-10-07T04:35:26Z 2003-06 Article Kim, S.J., Cho, B.J., Li, M.F., Yu, X., Zhu, C., Chin, A., Kwong, D.-L. (2003-06). PVD HfO2 for high-precision MIM capacitor applications. IEEE Electron Device Letters 24 (6) : 387-389. ScholarBank@NUS Repository. https://doi.org/10.1109/LED.2003.813381 07413106 http://scholarbank.nus.edu.sg/handle/10635/82950 000184254700007 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Capacitance density
HfO2
Metal-insulator-metal (MIM) capacitor
Sputter
Voltage coefficient of capacitor (VCC)
spellingShingle Capacitance density
HfO2
Metal-insulator-metal (MIM) capacitor
Sputter
Voltage coefficient of capacitor (VCC)
Kim, S.J.
Cho, B.J.
Li, M.F.
Yu, X.
Zhu, C.
Chin, A.
Kwong, D.-L.
PVD HfO2 for high-precision MIM capacitor applications
description 10.1109/LED.2003.813381
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Kim, S.J.
Cho, B.J.
Li, M.F.
Yu, X.
Zhu, C.
Chin, A.
Kwong, D.-L.
format Article
author Kim, S.J.
Cho, B.J.
Li, M.F.
Yu, X.
Zhu, C.
Chin, A.
Kwong, D.-L.
author_sort Kim, S.J.
title PVD HfO2 for high-precision MIM capacitor applications
title_short PVD HfO2 for high-precision MIM capacitor applications
title_full PVD HfO2 for high-precision MIM capacitor applications
title_fullStr PVD HfO2 for high-precision MIM capacitor applications
title_full_unstemmed PVD HfO2 for high-precision MIM capacitor applications
title_sort pvd hfo2 for high-precision mim capacitor applications
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/82950
_version_ 1781784259783032832