RHEED and XPS studies of the decomposition of silicon dioxide by the bombardment of metal ions

RHEED and XPS studies of the decomposition of silicon dioxide by the bombardment of metal ions

10.1016/S0218-625X(01)00128-2

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Bibliographic Details
Main Authors: Wang, S.J., Ong, C.K., Xu, S.Y., Chen, P., Chai, J.W., Tjiu, W.C., Pan, J.S., Huan, A.C.H., Feng, W., Lim, J.S., Yoo, W.J., Choi, W.K.
Other Authors: PHYSICS
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/82984
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Institution: National University of Singapore
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Summary:10.1016/S0218-625X(01)00128-2

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