RHEED and XPS studies of the decomposition of silicon dioxide by the bombardment of metal ions
10.1016/S0218-625X(01)00128-2
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Main Authors: | Wang, S.J., Ong, C.K., Xu, S.Y., Chen, P., Chai, J.W., Tjiu, W.C., Pan, J.S., Huan, A.C.H., Feng, W., Lim, J.S., Yoo, W.J., Choi, W.K. |
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Other Authors: | PHYSICS |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/82984 |
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Institution: | National University of Singapore |
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