RHEED and XPS studies of the decomposition of silicon dioxide by the bombardment of metal ions

• Main Authors: Wang, S.J., Ong, C.K., Xu, S.Y., Chen, P., Chai, J.W., Tjiu, W.C., Pan, J.S., Huan, A.C.H., Feng, W., Lim, J.S., Yoo, W.J., Choi, W.K.
• Other Authors: PHYSICS
• Format: Article
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/82984
• Institution: National University of Singapore

10.1016/S0218-625X(01)00128-2