Spectroscopic ellipsometry and electrical studies of as-grown and rapid thermal oxidized Si1-x-yGexCy films

Spectroscopic ellipsometry and electrical studies of as-grown and rapid thermal oxidized Si1-x-yGexCy films

10.1063/1.1413715

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Bibliographic Details
Main Authors: Choi, W.K., Feng, W., Bera, L.K., Yang, C.Y., Mi, J.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83046
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Institution: National University of Singapore
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Summary:10.1063/1.1413715

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