Spectroscopic ellipsometry and electrical studies of as-grown and rapid thermal oxidized Si1-x-yGexCy films
10.1063/1.1413715
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Main Authors: | Choi, W.K., Feng, W., Bera, L.K., Yang, C.Y., Mi, J. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/83046 |
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Institution: | National University of Singapore |
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