Probing the carrier concentration profiles in phosphorus-implanted germanium using infrared spectroscopic ellipsometry
10.1063/1.4913299
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| Main Authors: | , |
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| Other Authors: | |
| Format: | Article |
| Published: |
American Institute of Physics Inc.
2016
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| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/128146 |
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| Institution: | National University of Singapore |