Probing the carrier concentration profiles in phosphorus-implanted germanium using infrared spectroscopic ellipsometry

Probing the carrier concentration profiles in phosphorus-implanted germanium using infrared spectroscopic ellipsometry

10.1063/1.4913299

Saved in:
Bibliographic Details
Main Authors: D'Costa, V.R., Yeo, Y.-C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: American Institute of Physics Inc. 2016
Online Access:http://scholarbank.nus.edu.sg/handle/10635/128146
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore
id sg-nus-scholar.10635-128146
record_format dspace
spelling sg-nus-scholar.10635-1281462024-11-08T21:56:17Z Probing the carrier concentration profiles in phosphorus-implanted germanium using infrared spectroscopic ellipsometry D'Costa, V.R. Yeo, Y.-C. ELECTRICAL & COMPUTER ENGINEERING 10.1063/1.4913299 Journal of Applied Physics 117 7 2016-09-20T05:46:19Z 2016-09-20T05:46:19Z 2015 Article D'Costa, V.R., Yeo, Y.-C. (2015). Probing the carrier concentration profiles in phosphorus-implanted germanium using infrared spectroscopic ellipsometry. Journal of Applied Physics 117 (7). ScholarBank@NUS Repository. https://doi.org/10.1063/1.4913299 00218979 http://scholarbank.nus.edu.sg/handle/10635/128146 000351130900003 American Institute of Physics Inc.
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
description 10.1063/1.4913299
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
D'Costa, V.R.
Yeo, Y.-C.
format Article
author D'Costa, V.R.
Yeo, Y.-C.
spellingShingle D'Costa, V.R.
Yeo, Y.-C.
Probing the carrier concentration profiles in phosphorus-implanted germanium using infrared spectroscopic ellipsometry
author_sort D'Costa, V.R.
title Probing the carrier concentration profiles in phosphorus-implanted germanium using infrared spectroscopic ellipsometry
title_short Probing the carrier concentration profiles in phosphorus-implanted germanium using infrared spectroscopic ellipsometry
title_full Probing the carrier concentration profiles in phosphorus-implanted germanium using infrared spectroscopic ellipsometry
title_fullStr Probing the carrier concentration profiles in phosphorus-implanted germanium using infrared spectroscopic ellipsometry
title_full_unstemmed Probing the carrier concentration profiles in phosphorus-implanted germanium using infrared spectroscopic ellipsometry
title_sort probing the carrier concentration profiles in phosphorus-implanted germanium using infrared spectroscopic ellipsometry
publisher American Institute of Physics Inc.
publishDate 2016
url http://scholarbank.nus.edu.sg/handle/10635/128146
_version_ 1821222421752971264

Similar Items