Probing the carrier concentration profiles in phosphorus-implanted germanium using infrared spectroscopic ellipsometry
10.1063/1.4913299
Saved in:
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Article |
| Published: |
American Institute of Physics Inc.
2016
|
| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/128146 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | National University of Singapore |
| id |
sg-nus-scholar.10635-128146 |
|---|---|
| record_format |
dspace |
| spelling |
sg-nus-scholar.10635-1281462023-10-25T21:03:37Z Probing the carrier concentration profiles in phosphorus-implanted germanium using infrared spectroscopic ellipsometry D'Costa, V.R. Yeo, Y.-C. ELECTRICAL & COMPUTER ENGINEERING 10.1063/1.4913299 Journal of Applied Physics 117 7 2016-09-20T05:46:19Z 2016-09-20T05:46:19Z 2015 Article D'Costa, V.R., Yeo, Y.-C. (2015). Probing the carrier concentration profiles in phosphorus-implanted germanium using infrared spectroscopic ellipsometry. Journal of Applied Physics 117 (7). ScholarBank@NUS Repository. https://doi.org/10.1063/1.4913299 00218979 http://scholarbank.nus.edu.sg/handle/10635/128146 000351130900003 American Institute of Physics Inc. |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| description |
10.1063/1.4913299 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING D'Costa, V.R. Yeo, Y.-C. |
| format |
Article |
| author |
D'Costa, V.R. Yeo, Y.-C. |
| spellingShingle |
D'Costa, V.R. Yeo, Y.-C. Probing the carrier concentration profiles in phosphorus-implanted germanium using infrared spectroscopic ellipsometry |
| author_sort |
D'Costa, V.R. |
| title |
Probing the carrier concentration profiles in phosphorus-implanted germanium using infrared spectroscopic ellipsometry |
| title_short |
Probing the carrier concentration profiles in phosphorus-implanted germanium using infrared spectroscopic ellipsometry |
| title_full |
Probing the carrier concentration profiles in phosphorus-implanted germanium using infrared spectroscopic ellipsometry |
| title_fullStr |
Probing the carrier concentration profiles in phosphorus-implanted germanium using infrared spectroscopic ellipsometry |
| title_full_unstemmed |
Probing the carrier concentration profiles in phosphorus-implanted germanium using infrared spectroscopic ellipsometry |
| title_sort |
probing the carrier concentration profiles in phosphorus-implanted germanium using infrared spectroscopic ellipsometry |
| publisher |
American Institute of Physics Inc. |
| publishDate |
2016 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/128146 |
| _version_ |
1781790527264391168 |