Probing the carrier concentration profiles in phosphorus-implanted germanium using infrared spectroscopic ellipsometry
10.1063/1.4913299
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Main Authors: | D'Costa, V.R., Yeo, Y.-C. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Article |
Published: |
American Institute of Physics Inc.
2016
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/128146 |
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Institution: | National University of Singapore |
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