Spectroscopic ellipsometry and electrical studies of as-grown and rapid thermal oxidized Si1-x-yGexCy films
10.1063/1.1413715
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sg-nus-scholar.10635-830462023-10-29T20:54:57Z Spectroscopic ellipsometry and electrical studies of as-grown and rapid thermal oxidized Si1-x-yGexCy films Choi, W.K. Feng, W. Bera, L.K. Yang, C.Y. Mi, J. ELECTRICAL & COMPUTER ENGINEERING 10.1063/1.1413715 Journal of Applied Physics 90 11 5819-5824 JAPIA 2014-10-07T04:36:37Z 2014-10-07T04:36:37Z 2001-12 Article Choi, W.K., Feng, W., Bera, L.K., Yang, C.Y., Mi, J. (2001-12). Spectroscopic ellipsometry and electrical studies of as-grown and rapid thermal oxidized Si1-x-yGexCy films. Journal of Applied Physics 90 (11) : 5819-5824. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1413715 00218979 http://scholarbank.nus.edu.sg/handle/10635/83046 000172129200059 Scopus |
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National University of Singapore |
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Asia |
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Singapore Singapore |
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NUS Library |
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| description |
10.1063/1.1413715 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
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ELECTRICAL & COMPUTER ENGINEERING Choi, W.K. Feng, W. Bera, L.K. Yang, C.Y. Mi, J. |
| format |
Article |
| author |
Choi, W.K. Feng, W. Bera, L.K. Yang, C.Y. Mi, J. |
| spellingShingle |
Choi, W.K. Feng, W. Bera, L.K. Yang, C.Y. Mi, J. Spectroscopic ellipsometry and electrical studies of as-grown and rapid thermal oxidized Si1-x-yGexCy films |
| author_sort |
Choi, W.K. |
| title |
Spectroscopic ellipsometry and electrical studies of as-grown and rapid thermal oxidized Si1-x-yGexCy films |
| title_short |
Spectroscopic ellipsometry and electrical studies of as-grown and rapid thermal oxidized Si1-x-yGexCy films |
| title_full |
Spectroscopic ellipsometry and electrical studies of as-grown and rapid thermal oxidized Si1-x-yGexCy films |
| title_fullStr |
Spectroscopic ellipsometry and electrical studies of as-grown and rapid thermal oxidized Si1-x-yGexCy films |
| title_full_unstemmed |
Spectroscopic ellipsometry and electrical studies of as-grown and rapid thermal oxidized Si1-x-yGexCy films |
| title_sort |
spectroscopic ellipsometry and electrical studies of as-grown and rapid thermal oxidized si1-x-ygexcy films |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/83046 |
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1781784287317590016 |