Stability and composition of Ni-germanosilicided Si 1-xGe x films

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

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Bibliographic Details
Main Authors:	Pey, K.L., Chattopadhyay, S., Choi, W.K., Miron, Y., Fitzgerald, E.A., Antoniadis, D.A., Osipowicz, T.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/83062
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-83062
record_format	dspace
spelling	sg-nus-scholar.10635-830622024-11-09T00:15:44Z Stability and composition of Ni-germanosilicided Si 1-xGe x films Pey, K.L. Chattopadhyay, S. Choi, W.K. Miron, Y. Fitzgerald, E.A. Antoniadis, D.A. Osipowicz, T. ELECTRICAL & COMPUTER ENGINEERING PHYSICS Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 22 2 852-858 JVTBD 2014-10-07T04:36:49Z 2014-10-07T04:36:49Z 2004-03 Article Pey, K.L.,Chattopadhyay, S.,Choi, W.K.,Miron, Y.,Fitzgerald, E.A.,Antoniadis, D.A.,Osipowicz, T. (2004-03). Stability and composition of Ni-germanosilicided Si 1-xGe x films. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 22 (2) : 852-858. ScholarBank@NUS Repository. 10711023 http://scholarbank.nus.edu.sg/handle/10635/83062 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Pey, K.L. Chattopadhyay, S. Choi, W.K. Miron, Y. Fitzgerald, E.A. Antoniadis, D.A. Osipowicz, T.
format	Article
author	Pey, K.L. Chattopadhyay, S. Choi, W.K. Miron, Y. Fitzgerald, E.A. Antoniadis, D.A. Osipowicz, T.
spellingShingle	Pey, K.L. Chattopadhyay, S. Choi, W.K. Miron, Y. Fitzgerald, E.A. Antoniadis, D.A. Osipowicz, T. Stability and composition of Ni-germanosilicided Si 1-xGe x films
author_sort	Pey, K.L.
title	Stability and composition of Ni-germanosilicided Si 1-xGe x films
title_short	Stability and composition of Ni-germanosilicided Si 1-xGe x films
title_full	Stability and composition of Ni-germanosilicided Si 1-xGe x films
title_fullStr	Stability and composition of Ni-germanosilicided Si 1-xGe x films
title_full_unstemmed	Stability and composition of Ni-germanosilicided Si 1-xGe x films
title_sort	stability and composition of ni-germanosilicided si 1-xge x films
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/83062
_version_	1821193385963159552

Stability and composition of Ni-germanosilicided Si 1-xGe x films

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