Stability and composition of Ni-germanosilicided Si 1-xGe x films

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

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Main Authors:	Pey, K.L., Chattopadhyay, S., Choi, W.K., Miron, Y., Fitzgerald, E.A., Antoniadis, D.A., Osipowicz, T.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/83062
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-830622015-01-13T23:45:09Z Stability and composition of Ni-germanosilicided Si 1-xGe x films Pey, K.L. Chattopadhyay, S. Choi, W.K. Miron, Y. Fitzgerald, E.A. Antoniadis, D.A. Osipowicz, T. PHYSICS ELECTRICAL & COMPUTER ENGINEERING Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 22 2 852-858 JVTBD 2014-10-07T04:36:49Z 2014-10-07T04:36:49Z 2004-03 Article Pey, K.L.,Chattopadhyay, S.,Choi, W.K.,Miron, Y.,Fitzgerald, E.A.,Antoniadis, D.A.,Osipowicz, T. (2004-03). Stability and composition of Ni-germanosilicided Si 1-xGe x films. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 22 (2) : 852-858. ScholarBank@NUS Repository. 10711023 http://scholarbank.nus.edu.sg/handle/10635/83062 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
author2	PHYSICS
author_facet	PHYSICS Pey, K.L. Chattopadhyay, S. Choi, W.K. Miron, Y. Fitzgerald, E.A. Antoniadis, D.A. Osipowicz, T.
format	Article
author	Pey, K.L. Chattopadhyay, S. Choi, W.K. Miron, Y. Fitzgerald, E.A. Antoniadis, D.A. Osipowicz, T.
spellingShingle	Pey, K.L. Chattopadhyay, S. Choi, W.K. Miron, Y. Fitzgerald, E.A. Antoniadis, D.A. Osipowicz, T. Stability and composition of Ni-germanosilicided Si 1-xGe x films
author_sort	Pey, K.L.
title	Stability and composition of Ni-germanosilicided Si 1-xGe x films
title_short	Stability and composition of Ni-germanosilicided Si 1-xGe x films
title_full	Stability and composition of Ni-germanosilicided Si 1-xGe x films
title_fullStr	Stability and composition of Ni-germanosilicided Si 1-xGe x films
title_full_unstemmed	Stability and composition of Ni-germanosilicided Si 1-xGe x films
title_sort	stability and composition of ni-germanosilicided si 1-xge x films
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/83062
_version_	1681089366730997760

Stability and composition of Ni-germanosilicided Si 1-xGe x films

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