Stability and composition of Ni-germanosilicided Si 1-xGe x films
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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Main Authors: | Pey, K.L., Chattopadhyay, S., Choi, W.K., Miron, Y., Fitzgerald, E.A., Antoniadis, D.A., Osipowicz, T. |
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Other Authors: | PHYSICS |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/83062 |
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Institution: | National University of Singapore |
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