Static large-area hydrogenation of polycrystalline silicon thin-film solar cells on glass using a linear microwave plasma source

Static large-area hydrogenation of polycrystalline silicon thin-film solar cells on glass using a linear microwave plasma source

10.1109/JPHOTOV.2012.2202878

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Bibliographic Details
Main Authors: Hidayat, H., Widenborg, P.I., Kumar, A., Law, F., Aberle, A.G.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Hydrogenation
large-area processing
polycrystalline silicon
thin-film solar cells
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83069
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Institution: National University of Singapore

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