A comparison study of high-density MIM capacitors with ALD HfO 2-Al 2O 3 laminated, sandwiched and stacked dielectrics

A comparison study of high-density MIM capacitors with ALD HfO 2-Al 2O 3 laminated, sandwiched and stacked dielectrics

International Conference on Solid-State and Integrated Circuits Technology Proceedings, ICSICT

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Main Authors: Ding, S.-J., Hu, H., Zhu, C., Kim, S.J., Li, M.F., Cho, B.J., Chin, A., Kwong, D.-L.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83342
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-833422015-01-09T14:06:29Z A comparison study of high-density MIM capacitors with ALD HfO 2-Al 2O 3 laminated, sandwiched and stacked dielectrics Ding, S.-J. Hu, H. Zhu, C. Kim, S.J. Li, M.F. Cho, B.J. Chin, A. Kwong, D.-L. ELECTRICAL & COMPUTER ENGINEERING International Conference on Solid-State and Integrated Circuits Technology Proceedings, ICSICT 1 403-406 2014-10-07T04:40:09Z 2014-10-07T04:40:09Z 2004 Conference Paper Ding, S.-J.,Hu, H.,Zhu, C.,Kim, S.J.,Li, M.F.,Cho, B.J.,Chin, A.,Kwong, D.-L. (2004). A comparison study of high-density MIM capacitors with ALD HfO 2-Al 2O 3 laminated, sandwiched and stacked dielectrics. International Conference on Solid-State and Integrated Circuits Technology Proceedings, ICSICT 1 : 403-406. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/83342 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description International Conference on Solid-State and Integrated Circuits Technology Proceedings, ICSICT
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Ding, S.-J.
Hu, H.
Zhu, C.
Kim, S.J.
Li, M.F.
Cho, B.J.
Chin, A.
Kwong, D.-L.
format Conference or Workshop Item
author Ding, S.-J.
Hu, H.
Zhu, C.
Kim, S.J.
Li, M.F.
Cho, B.J.
Chin, A.
Kwong, D.-L.
spellingShingle Ding, S.-J.
Hu, H.
Zhu, C.
Kim, S.J.
Li, M.F.
Cho, B.J.
Chin, A.
Kwong, D.-L.
A comparison study of high-density MIM capacitors with ALD HfO 2-Al 2O 3 laminated, sandwiched and stacked dielectrics
author_sort Ding, S.-J.
title A comparison study of high-density MIM capacitors with ALD HfO 2-Al 2O 3 laminated, sandwiched and stacked dielectrics
title_short A comparison study of high-density MIM capacitors with ALD HfO 2-Al 2O 3 laminated, sandwiched and stacked dielectrics
title_full A comparison study of high-density MIM capacitors with ALD HfO 2-Al 2O 3 laminated, sandwiched and stacked dielectrics
title_fullStr A comparison study of high-density MIM capacitors with ALD HfO 2-Al 2O 3 laminated, sandwiched and stacked dielectrics
title_full_unstemmed A comparison study of high-density MIM capacitors with ALD HfO 2-Al 2O 3 laminated, sandwiched and stacked dielectrics
title_sort comparison study of high-density mim capacitors with ald hfo 2-al 2o 3 laminated, sandwiched and stacked dielectrics
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/83342
_version_ 1681089418253828096

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