A new self-aligned contact technology for III-V MOSFETs

10.1109/VTSA.2010.5488907

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Bibliographic Details
Main Authors:	Guo, H., Zhang, X., Chin, H.-C., Gong, X., Koh, S.-M., Zhan, C., Luo, G.-L., Chang, C.-Y., Lin, H.-Y., Chien, C.-H., Han, Z.-Y., Huang, S.-C., Cheng, C.-C., Ko, C.-H., Wann, C.H., Yeo, Y.-C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/83388
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-83388
record_format	dspace
spelling	sg-nus-scholar.10635-833882015-01-08T07:14:56Z A new self-aligned contact technology for III-V MOSFETs Guo, H. Zhang, X. Chin, H.-C. Gong, X. Koh, S.-M. Zhan, C. Luo, G.-L. Chang, C.-Y. Lin, H.-Y. Chien, C.-H. Han, Z.-Y. Huang, S.-C. Cheng, C.-C. Ko, C.-H. Wann, C.H. Yeo, Y.-C. ELECTRICAL & COMPUTER ENGINEERING 10.1109/VTSA.2010.5488907 Proceedings of 2010 International Symposium on VLSI Technology, System and Application, VLSI-TSA 2010 152-153 2014-10-07T04:40:40Z 2014-10-07T04:40:40Z 2010 Conference Paper Guo, H.,Zhang, X.,Chin, H.-C.,Gong, X.,Koh, S.-M.,Zhan, C.,Luo, G.-L.,Chang, C.-Y.,Lin, H.-Y.,Chien, C.-H.,Han, Z.-Y.,Huang, S.-C.,Cheng, C.-C.,Ko, C.-H.,Wann, C.H.,Yeo, Y.-C. (2010). A new self-aligned contact technology for III-V MOSFETs. Proceedings of 2010 International Symposium on VLSI Technology, System and Application, VLSI-TSA 2010 : 152-153. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/VTSA.2010.5488907" target="_blank">https://doi.org/10.1109/VTSA.2010.5488907</a> 9781424450633 http://scholarbank.nus.edu.sg/handle/10635/83388 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	10.1109/VTSA.2010.5488907
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Guo, H. Zhang, X. Chin, H.-C. Gong, X. Koh, S.-M. Zhan, C. Luo, G.-L. Chang, C.-Y. Lin, H.-Y. Chien, C.-H. Han, Z.-Y. Huang, S.-C. Cheng, C.-C. Ko, C.-H. Wann, C.H. Yeo, Y.-C.
format	Conference or Workshop Item
author	Guo, H. Zhang, X. Chin, H.-C. Gong, X. Koh, S.-M. Zhan, C. Luo, G.-L. Chang, C.-Y. Lin, H.-Y. Chien, C.-H. Han, Z.-Y. Huang, S.-C. Cheng, C.-C. Ko, C.-H. Wann, C.H. Yeo, Y.-C.
spellingShingle	Guo, H. Zhang, X. Chin, H.-C. Gong, X. Koh, S.-M. Zhan, C. Luo, G.-L. Chang, C.-Y. Lin, H.-Y. Chien, C.-H. Han, Z.-Y. Huang, S.-C. Cheng, C.-C. Ko, C.-H. Wann, C.H. Yeo, Y.-C. A new self-aligned contact technology for III-V MOSFETs
author_sort	Guo, H.
title	A new self-aligned contact technology for III-V MOSFETs
title_short	A new self-aligned contact technology for III-V MOSFETs
title_full	A new self-aligned contact technology for III-V MOSFETs
title_fullStr	A new self-aligned contact technology for III-V MOSFETs
title_full_unstemmed	A new self-aligned contact technology for III-V MOSFETs
title_sort	new self-aligned contact technology for iii-v mosfets
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/83388
_version_	1681089426694864896

A new self-aligned contact technology for III-V MOSFETs

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