Characterization of a multi-layered MEMS pressure sensor using piezoresistive silicon nanowire within large measurable strain range

10.1109/NEMS.2012.6196732

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Bibliographic Details
Main Authors:	Lou, L., Zhang, S., Park, W.-T., Lim, L., Kwong, D.-L., Lee, C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	pressure sensor silicon nanowire
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/83538
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-83538
record_format	dspace
spelling	sg-nus-scholar.10635-835382015-01-08T02:52:37Z Characterization of a multi-layered MEMS pressure sensor using piezoresistive silicon nanowire within large measurable strain range Lou, L. Zhang, S. Park, W.-T. Lim, L. Kwong, D.-L. Lee, C. ELECTRICAL & COMPUTER ENGINEERING pressure sensor silicon nanowire 10.1109/NEMS.2012.6196732 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012 99-103 2014-10-07T04:42:21Z 2014-10-07T04:42:21Z 2012 Conference Paper Lou, L.,Zhang, S.,Park, W.-T.,Lim, L.,Kwong, D.-L.,Lee, C. (2012). Characterization of a multi-layered MEMS pressure sensor using piezoresistive silicon nanowire within large measurable strain range. 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012 : 99-103. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/NEMS.2012.6196732" target="_blank">https://doi.org/10.1109/NEMS.2012.6196732</a> 9781467311243 http://scholarbank.nus.edu.sg/handle/10635/83538 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	pressure sensor silicon nanowire
spellingShingle	pressure sensor silicon nanowire Lou, L. Zhang, S. Park, W.-T. Lim, L. Kwong, D.-L. Lee, C. Characterization of a multi-layered MEMS pressure sensor using piezoresistive silicon nanowire within large measurable strain range
description	10.1109/NEMS.2012.6196732
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Lou, L. Zhang, S. Park, W.-T. Lim, L. Kwong, D.-L. Lee, C.
format	Conference or Workshop Item
author	Lou, L. Zhang, S. Park, W.-T. Lim, L. Kwong, D.-L. Lee, C.
author_sort	Lou, L.
title	Characterization of a multi-layered MEMS pressure sensor using piezoresistive silicon nanowire within large measurable strain range
title_short	Characterization of a multi-layered MEMS pressure sensor using piezoresistive silicon nanowire within large measurable strain range
title_full	Characterization of a multi-layered MEMS pressure sensor using piezoresistive silicon nanowire within large measurable strain range
title_fullStr	Characterization of a multi-layered MEMS pressure sensor using piezoresistive silicon nanowire within large measurable strain range
title_full_unstemmed	Characterization of a multi-layered MEMS pressure sensor using piezoresistive silicon nanowire within large measurable strain range
title_sort	characterization of a multi-layered mems pressure sensor using piezoresistive silicon nanowire within large measurable strain range
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/83538
_version_	1681089454340571136

Characterization of a multi-layered MEMS pressure sensor using piezoresistive silicon nanowire within large measurable strain range

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