Characterization of a multi-layered MEMS pressure sensor using piezoresistive silicon nanowire within large measurable strain range

• Main Authors: Lou, L., Zhang, S., Park, W.-T., Lim, L., Kwong, D.-L., Lee, C.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: pressure sensor; silicon nanowire
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/83538
• Institution: National University of Singapore

10.1109/NEMS.2012.6196732