Enhanced performance in strained n-FET with double-recessed Si:C source/drain and lattice-mismatched SiGe strain-transfer structure (STS)

10.1109/ISDRS.2007.4422277

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Bibliographic Details
Main Authors: Ang, K.-W., Wong, H.-S., Balasubramanian, N., Samudra, G., Yeo, Y.-C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83701
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Institution: National University of Singapore
Description
Summary:10.1109/ISDRS.2007.4422277