Oxidation study of rf sputtered amorphous and polycrstalline silicon germanium films
International Journal of Modern Physics B
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2014
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sg-nus-scholar.10635-840652015-01-06T04:21:27Z Oxidation study of rf sputtered amorphous and polycrstalline silicon germanium films Leoy, C.C. Kan, E.W.H. Arianto, J. Choi, W.K. Wee, A.T.S. Liu, Y.J. INSTITUTE OF ENGINEERING SCIENCE PHYSICS ELECTRICAL & COMPUTER ENGINEERING International Journal of Modern Physics B 16 28-29 4224-4227 IJPBE 2014-10-07T04:48:23Z 2014-10-07T04:48:23Z 2002-11-20 Conference Paper Leoy, C.C.,Kan, E.W.H.,Arianto, J.,Choi, W.K.,Wee, A.T.S.,Liu, Y.J. (2002-11-20). Oxidation study of rf sputtered amorphous and polycrstalline silicon germanium films. International Journal of Modern Physics B 16 (28-29) : 4224-4227. ScholarBank@NUS Repository. 02179792 http://scholarbank.nus.edu.sg/handle/10635/84065 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| description |
International Journal of Modern Physics B |
| author2 |
INSTITUTE OF ENGINEERING SCIENCE |
| author_facet |
INSTITUTE OF ENGINEERING SCIENCE Leoy, C.C. Kan, E.W.H. Arianto, J. Choi, W.K. Wee, A.T.S. Liu, Y.J. |
| format |
Conference or Workshop Item |
| author |
Leoy, C.C. Kan, E.W.H. Arianto, J. Choi, W.K. Wee, A.T.S. Liu, Y.J. |
| spellingShingle |
Leoy, C.C. Kan, E.W.H. Arianto, J. Choi, W.K. Wee, A.T.S. Liu, Y.J. Oxidation study of rf sputtered amorphous and polycrstalline silicon germanium films |
| author_sort |
Leoy, C.C. |
| title |
Oxidation study of rf sputtered amorphous and polycrstalline silicon germanium films |
| title_short |
Oxidation study of rf sputtered amorphous and polycrstalline silicon germanium films |
| title_full |
Oxidation study of rf sputtered amorphous and polycrstalline silicon germanium films |
| title_fullStr |
Oxidation study of rf sputtered amorphous and polycrstalline silicon germanium films |
| title_full_unstemmed |
Oxidation study of rf sputtered amorphous and polycrstalline silicon germanium films |
| title_sort |
oxidation study of rf sputtered amorphous and polycrstalline silicon germanium films |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/84065 |
| _version_ |
1681089550656471040 |